EBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems.

Pump lines and gas lines have unique thermal challenges due to many factors, including poor conductivity of stainless steel, differing thermal masses of plumbing components, and ambient temperature changes between the cleanroom and subfab.

EBARA heater products provide uniform heat flux to prevent condensation in gas delivery lines and clogging in pump lines.

EBARA provides "turn-key" service from system survey and measurement to heater and controller installation and test.