A Turbomolecular Pump is a transfer type, mechanical high vacuum pump that consists of a rotating turbine blade (rotation speeds as high as 90k rpm) which imparts kinetic energy on the gas causing the molecules to move towards the turbomolecular pump exhaust. All EBARA Technologies, Inc. turbo pumps are compound turbo pumps which add a second molecular drag stage to the same shaft. The addition of this stage increases the compression ratio of the pump and also greatly increases the highest allowable foreline pressure of the pump.
EBARA Technologies, Inc. offers two complete lines of turbomolecular pumps the EMT series and the EBT series.
The EMT series pumps are 5-axis MagLev pumps that are completely hydrocarbon free. These pumps are suitable for varied applications from the harshest semiconductor application as well as ultra-high vacuum and ultra-low vibration applications.
The EBT series of pumps is a full line of ceramic bearing pumps suitable for Analytical and R&D vacuum needs. The EBT Ceramic Bearing system is extremely rugged making it ideal for mobile applications. The EBT70 and EBT240 pumps are available with integrated controller.