• Angle Particulate
  • Coaxial Particulate
  • EBARA's Angle Particulate Foreline Traps

    These traps remove particles that might enter the mechanical pump and contaminate the oil. Standard traps include a polyester felt filter that traps particles over 10 microns in size at 98% efficiency. Filters can be cleaned with a vacuum cleaner. Suitable for process temperatures from ambient to 149°C (300°F). Filters with other micron ratings are available upon request.

    Woven, 10 micron fiberglass filters are available as an option. They provide a much longer service life than a polyester filter. Fiberglass filter is required for temperatures greater than 149°C (300°F). Maximum fiberglass filter temperature is 370°C (698°F). Filters with other micron ratings are available upon request.

    The high capacity fiberglass filter option provides a reservoir for applications with heavy particle loads that might block the inlet. The high capacity filter option is not available for 8 in bodies.

    The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. For proper sealing, apply a light coating of Krytox lube when cleaning or replacing the O-ring. Standard finish is beadblast. Electropolish finish, large body sizes, ultra-high capacity , and custom flange configurations are available.


    Specifications
    Material
       Trap Body: 304 stainless steel
       Flanges: 304 stainless steel
       Filter: polyester or fiberglass
    Vacuum range: >= 1 x 10-8 Torr
    Temperature range: -20°C to 150°C
    Options: ISO body flanges, woven fiberglass or high capacity fiberglass filter, electropolish

    Drawings
    MODEL NUMBERBODY
    OD
    FLANGESPORT
    OD
    ABCD
    ATP-6-1502-KFB6KF-40B11/213.906.9010.404.65
    ATP-6-2002-KFB6KF-50B213.906.9010.154.65
    ATP-8-1502-KFB8*KF-40B11/213.909.0010.405.65
    ATP-8-2002-KFB8*KF-50B213.909.0010.155.65
    ATP-8-3002-ISO8*ISO-80219.359.0015.255.65
    ATP-8-4002-ISO8*ISO-100219.359.0015.255.65
    * High capacity filter not available for 8 inch body

     
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