Model E.DOC-SC

Dynamic Oxidation is the most cost effective abatement solutions for pyrophoric gas abatement. Pure Air Systems Inc. has been a pioneer in the development of pyrophoric gas abatement technologies since 1999. Large flows of pyrophoric gases like SiH4 are used extensively in Semiconductor and Thin Film Solar manufacturing processes. Dynamic oxidation provides one of the most reliable abatement methods at the lowest capital and operation cost. Managing the particles can be at integrated at point-of-use in the system or scaled up to a facility system. The dynamic oxidation units can be fitted with a mechanical filter (S.DOC), no filters (S.DOC Cyclone) or water scrubber (E.DOC-SC) to handle any water soluble gases.


  • Dynamic oxidation is a highly effective method to abate pyrophoric effluent gases.
  • A place where reactions are forced to occur.
  • Achieves high conversion efficiencies without active burning or added heat, by forced turbulent mixing of the pyrophorics with large quantities of air.
  • Each pyrophoric gas molecule undergoes numerous collisions with oxygen molecules increasing the probability of reaction to 100% and eliminating the hazards from the effluent stream.
  • Chlorine
  • Boron Trichloride
  • Hydrogen Bromide
  • Ammonia
  • TEOS
  • Dichlorosilane
  • Specifications
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    Process Schematic
     
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