Ceramic Bearing
Turbo Pumps
  • Model EBT70
  • Model EBT220
  • Model EBT240
  • Model EBT350
  • Model EBT450
  • Model EBT800
  • Model EBT1100
  • Model EBT1400
  • Model EBT2400
    		•
    Model EBT70

    The EBT Series turbomolecular pump line compliments EBARA’s existing offering of turbomolecular pump systems. The EBT Series are a highly efficient cost effective solution to your high vacuum pumping needs. EBARA’s EBT Series turbomolecular pumps offer ceramic bearing, which provides for a clean, reliable vacuum for today’s high tech manufacturing, semiconductor, thin film, and photovoltaic industries. The EBT Series pumps can be mounted in any orientation and have tuning free half rack controllers requiring no battery backup. The EBT Series offers three major types of turbomolecular pumps cooling: naturally cooled, fan cooled and water cooled. EBARA also offers the EBT turbomolecular pumps with an optional On-Board controller.
  • Installation in Any Orientation
  • Energy Savings
  • Quick Start up
  • Quick Shut down with air vent
  • Durable structure for Air Inrush
  • Compact Size
  • Serial Communication
  • Automatic Calibration
  • High Throughput
  • Vibration Free
  • Air or Water Cooled
  • Safety Standards UL, CE, SEMI, NRTL

  • Semiconductor
  • Photovoltaic
  • Electronic Parts Manufacturing
  • Analalical Equipment
  • Research and Development

    • Specifications
    Flange Inlet CF63
    Outlet KF16
    Volume Flow Rate N2 (L/s) 75
    N2 with protective screen (L/s) 70
    H2 (L/s) 45
    Maximum Compression Ratio N2 1 x 108
    H2 1 x 105
    Ultimate Pressure Torr < 7.5 x 10-10
    Pa < 1 x 10-7
    Maximum Throughput N2 (sccm) 10
    N2 (Pa x L/s) 18
    Ar (sccm) 5
    Ar (Pa x L/s) 9.2
    Maximum Backing Pressure Torr 9.0
    Pa 1200
    Recommended Backing Pump L/min ≥ 25
    CFM ≥ 0.8
    Startup Time min 2.0 - 2.5
    Shutdown Time min 20.0 - 25.0
    Vibration Level (0 - peak) μm ≤ 0.2
    Rated Rotational Speed min-1 90000
    Installation Position   Any
    Cooling System   Free Convection Air Cooling
    Bearing System   Grease-Lubricated Ball Bearing
    Permissible Ambient Temperature Deg C 8.0-38.0
    Deg F 46-100
    Major Materials   Al Alloy
    Weight kg 5.0
    lb 11.0
    Bearing Life hours  

    Drawings
    		 
    © 2013 - EBARA Technologies