Gauges
  • Model EGP
  • Model EGPC
  • Model EGPI
  • Model EGT
  • Model EGC
  • Model EGCP
    		•
    Model EGPC

    EBARA Technologies, Inc. Pirani/Capacitance gauges combine the wide measurement range of a Pirani gauge with the gas independent accuracy at atmosphere of a capacitance gauge. The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints. EBARA Technologies, Inc. Pirani/Capacitance gauges typically would be used in applications where high accuracy at atmosphere is required such as Loadlocks.
  • Gas-type independent above 10 mbar - allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere - for reliable atmospheric pressure detection
  • Fast atmospheric detection - eliminates waiting time and shortens process cycle
  • Mount in any orientation
  • Available with Tungsten or Nickel filament or with a fully ceramic coated sensor unit for highly corrosive applications
  • Easy to exchange plug & play sensor element with on-board calibration data - guarantees high reproducibility and low cost of ownership
  • Eligible output signal for easy integration
  • Diagnostic port
  • Optional atmospheric switch, display and digital interfaces

  • Load lock control
  • Fore vacuum pressure measurement
  • Safet circuits in vacuum systems
  • General vacuum measurement and control in the medium and rough vacuum range

    • Specifications
    TYPEUNITEGPC550
    Tungsten    		EGPC552
    Nickel    		EGPC554
    Ceramic Coated
    Measurement rangembar (Torr)5 x 10-5 ...1500 (3.8x10-5 ...125)
    Accuracy5x10-4...1x10-3 mbar (N2) % of reading
    1x10-3...100 mbar(N2) % of reading
    100...950 mbar % of reading
    950...1050 mbar % of reading    		 ±50
    ±15
    ±5
    ±2.5
    Repeatability1x10-3...1100 mbar(N2) % of reading±2
    Supply voltage
    Power consumption
      without Fieldbus
      DeviceNet
      Profibus    		 V / A DC

    W
    W
    W    		±15...30

    ≤2.5
    ≤3
    ≤3
    Setpoint relay
      Range (N2)
      Relay contact
      Hysteresis
      Contact rating
        Solid state relays
        Mechanical relays
      Switching time
    mbar

    % of threshold

    V / A DC
    V / A DC
    ms    		 2
    5x10-5...1500
    n.o., potential free
    10

    ≤30 / ≤0.3
    ≤30 / ≤1
    ≤30
    Interface (digital) RS232C
    Cable length
      RS232C operation    		m (ft)≤100 (≤330)
    ≤30 (≤100)
    Materials exposed to vacuum W, Ni, NiFe, Al2O3, SnAg, stainless steel, glassNi, NiFe, Al2O3, SnAg, stainless steel, glassAl2O3,stainless steel

    		 
    © 2013 - EBARA Technologies