Gauges
  • Model EGP
  • Model EGPC
  • Model EGPI
  • Model EGT
  • Model EGC
  • Model EGCP
    		•
    Model EGPI

    EBARA Technologies, Inc. Pirani/Ionization gauges combine the wide measurement range of a Pirani gauge with the high vacuum measurement range of a hot cathode ionization gauge. These gauges are usable from Atmospheric pressure all the way to ultra-high vacuum (5 e-10 Torr). The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Piran/Ionization gauges are available with either KF or CF flanges.
  • Extremely wide measurement range from 5 x 10-10 mbar to atmosphere (3.8 x 10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8...10-2 mbar of 5%
  • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
  • Long-life yttrium oxide coated iridum filament
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the fine and rough vacuum range

    • Specifications
    Contact EBARA for more information.

    		 
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