Model ESAer
Dry Vacuum Pumps
  • Model ESA25S
  • Model ESA70W
  • Model ESA100W
  • Model ESA200W
  • Model ESA300W
  • Model ESA500W
    		•
    Model ESA100W

    The ESA Series consists of a two-stage main pump design engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.

    The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Variable pumping speed to match application requirements
  • High performance brushless DC motor on the booster pump
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked

  • Contact EBARA for more information

    • Specifications
    Pumping Speed 50/60 Hz
    		 CFM
    L/min
    M3/Hr    		 353
    10000
    600
    Ultimate Pressure 50/60 Hz
    		 mTorr
    Pa
    mBar
    		0.000002
    0.27
    0.0027
    Connection Gas Inlet NW 50
    Gas Outlet NW 40
    Power at Ultimate Pressure KW 3.4
    Maximum Power KW 5.2
    Cooling Water Requirements Min. Flow Rate
    L/min    		 3.5

    Bearing and Dilution N2

    		 Bearing Seals
    L/min    		 12
    Cabinet Dimensions
    LxWxH     		inches
    mm    		 41 x 15.7 x 31.9
    1041 x 400 x 810
    Weight lbs
    kg    		 882
    400

    		 
    © 2013 - EBARA Technologies