The ESR Series (Energy Saving Roots) are multistage dry vacuum pump engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 35 ~ 1,625 CFM with an ultimate pressure as low as 1 mTorr.
Built on EBARA's experience, the ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and motor controls. These enhancements drastic reduces utility consumption (electrical power, cooling water, nitrogen, footprint) compared to AC motored pumps. Intelligent controls allows the ESR Series pumps to be tuned to the vacuum requirements can be throttled down and be placed in an idle mode when not used for processing. For clean application no nitrogen purge is required. A minimal amount of nitrogen purging along with the pump constructed out of NiResist (homogeneous steel alloy with high nickel content) makes the ESR ideal for pumping corrosive gases.
EBARA is a world leader in the design and manufacture of "dry" mechanical vacuum pumps. EBARA dry vacuum pumps provide a host of product enhancements including increased reliability, reduced clean room particulate load, low noise, low vibration, lower operating costs, and the lowest cost of ownership.