Model EST300WN

The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.

The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is onstructed of NiResist, a solid cast material known for its superior corrosion resistance.


  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Variable pumping speed to match application requirements
  • High performance brushless DC motors
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked
  • Contact EBARA for more information
  • Specifications
    Pumping Speed 50/60 Hz
    CFM
    L/min
    M3/Hr
    520 - 1,060
    15,000 30,000
    900 - 1,800
    Ultimate Pressure 50/60 Hz
    mTorr
    Pa
    mBar
    3
    0.4
    0.004
    Connection Gas Inlet ISO 160
    Gas Outlet NW 40
    Power at Ultimate Pressure KW 4.5
    Maximum Power KW 9.5
    Cooling Water Requirements Min. Flow Rate
    L/min
    5

    Bearing and Dilution N2

    Bearing Seals
    L/min
    14 to 17
    Cabinet Dimensions
    LxWxH
    inches
    mm
    39 x 20.5 x 34.4
    990 x 520 x 873
    Weight lbs
    kg
    1102
    500

    Performance
    Drawings
     
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