The EV-S Series pumps are energy efficient vacuum pumps for clean to light duty processes such as Load Lock, SEM, PVD, Ashing, Ion Implant and Etch. The EV-S Series provides pumping speeds from 58 to 710 CFM with an ultimate pressure as low as 3 mTorr. Options include: nitrogen purge, Niresist (Nickel alloy) to prevent corrosion and idle mode allows the tool to send a remotely controlled signal to save additional energy.
