EBARA's Burner Washer Model G5 (principle: Gas Decomposition by Combustion) is a high efficient universal abatement system for abatement of the waste gases in the semiconductor, solar and thin films manufacturing. It is designed for the abatement of both CVD and etch gases. Global environmental regulations concerning PFC gases are becoming more and more stringent. The G5 is a unique abatement system equipped with a patented "rolling" burner that guarantees reliable PFC abatement to an unprecedented low level. The system is equipped with a large water tank for efficient absorption of water soluble gases and solid burn products. The total waste capacity is 350 slm including nitrogen purge from vacuum pumps.
The thermal decomposition in the flame is followed by a wet scrubbing of the burned products in a 5-stage water scrubber to retain the remaining particles and adsorb the water soluble gases.