EBARA's Burner Washer Model GDC250 (Gas Decomposition by Combustion) is a high efficient universal abatement system for abatement of the waste gases in the semiconductor, solar and thin films manufacturing. It is designed for the abatement of both CVD and etch gases. Global environmental regulations concerning PFC gases are becoming more and more stringent. The GDC250 is a unique abatement system equipped with a patented "rolling" burner reaching a temperature of 2,500°C. The GDC250 burner washer guarantees PFC abatement to an unprecedented low level. Even the most stable CF4 can be abated to a lower than 1 ppm. The total waste capacity is 250 slm including nitrogen purge from vacuum pumps.
The thermal decomposition in the flame is followed by a wet scrubbing of the burned products in a 2-stage water scrubber to retain the remaining particles and adsorb the water soluble gases.