Point-of-Use Abatement
Combustion Wash
  • Model G5
  • Model G6
  • Model G6-E
  • Model G6-PV
  • Model GCR
  • Model GDC250
  • Model GT
    		•
    Model GDC250

    EBARA's Burner Washer Model GDC250 (Gas Decomposition by Combustion) is a high efficient universal abatement system for abatement of the waste gases in the semiconductor, solar and thin films manufacturing. It is designed for the abatement of both CVD and etch gases. Global environmental regulations concerning PFC gases are becoming more and more stringent. The GDC250 is a unique abatement system equipped with a patented "rolling" burner reaching a temperature of 2,500°C. The GDC250 burner washer guarantees PFC abatement to an unprecedented low level. Even the most stable CF4 can be abated to a lower than 1 ppm. The total waste capacity is 250 slm including nitrogen purge from vacuum pumps.

    The thermal decomposition in the flame is followed by a wet scrubbing of the burned products in a 2-stage water scrubber to retain the remaining particles and adsorb the water soluble gases.
  • High efficient burner washer (e.g. >99% for PFCs) for low and high waste gas flows.
  • Highest standards of safety to eliminate any risks for operators and environment.
  • Lowest Cost of Ownership through low utility costs and by long maintenance intervals.
  • No risk of corrosion - all pipes are coated inside with corrosion resistant material. No neutralization agent is necessary.
  • The system operates with city water, no water pre-conditioning is required.
  • Automatic scrapers for mechanical cleaning of reactor and burner prevent blockages allow cleaning without opening the system and reduce the preventive maintenance impact.
  • Flexible burning gases are possible.
  • Best possible reduction of nitrogen oxides (NOx) by small amounts of purge gas necessary. That is especially true in combination with EBARA dry vacuum pumps with their small amounts of N2 purge required.
  • Various operation modes: high, medium,low and idle operation mode allow to save utilities cost.

  • Contact EBARA for more information

    • Specifications
    Maximum flow rate250 slm
    Inlet portmax. 4 ports NW 40
    Dimensions35.4 (w) x 35.4 (d) x 71 (h) in.
    Weight1200 lb.
    Voltage ranges208/400 VAC, 50/60 Hz
    Maximum power1.5 kVA
    Fuel typeNatural gas, propane or hydrogen
    Fuel*Natural gas: 14 [26] slm
    Propane: 6 [11] slm
    Hydrogen: 35 [80] slm
    Oxygen*20 [58] slm
    Dry air*100 [140] slm
    Nitrogen38 slm (during operation)
    City water9 l/min (drain water)
    * Values in brackets, [] show consumption when abating CF4

    		 
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