Point-of-Use Abatement
Wet Scrubbing
  • Model V
  • Model C
    		•
    Model C

    The Model C is Airgard's deluxe model. This model has a PLC based control box that monitors and controls all scrubber functions (water level, fresh water flow, pump water flow, gas inlet plunger position) and interfaces with the reactor and the facility. The PLC can be programmed by a laptop PC. This allows easy changes to timers and control logic that a customer may want for their specific needs. Additionally, the Model C model has an automated gas inlet plunger (AGIP). The AGIP can be programmed to plunge the gas inlet at a variety of different times or conditions.
  • Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.
  • Automated gas inlet plunger removes restrictions without process interruption.
  • Highly efficient removal of water soluble gases such as HCl, HF, HBr, NH3, F2, BCl3, Chlorosilanes (SiHCl3, SiH2Cl2, SiCl4) and Flourosilanes (SiF4).
  • Reduces most harmful gas emissions to less than 1 part per million in high gas flow rates of up to 5000 SLM.
  • Lowest fresh water consumption in the industry - up to 50% less.
  • Small footprint.
  • No foaming and no sediment.
  • Programmable logic scrubber control box automates gas inlet plunger to reactor functions and reports scrubber status.

  • EPI (High Flow/Solar applications)
  • PV Processes
  • Dedicated NH3 treatment for house separation
  • Purification Processes
  • Gas Cabinet Vent
  • Chemical Manufacturing
  • All water soluble process gasses

    • Specifications
    Gas Inlet Devices
    Patent gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions
    Second Scrubbing Chamber
    Five fine spray, high velocity nozzles ensures effective removal of impurities
    First Scrubbing Chamber
    Coarse spray, high flow nozzle coats chamber and removes bulk impurities
    Pump
    Corrosion resistant high output and long life recirculates 35 GPM
    Small Foot Print
    24 ½" x 32 ½"
    Sump Geometry
    Unique pump input, drain and fresh water input locations prevent foaming, sediment and minimize water use
    Fresh Water Input
    Strategic position increases efficiency, minimizes water use and eliminates foam
    Packed Column
    The final polish. Packing Requires no maintenance or replacement
    Eductor Cone
    Keeps exhaust line at slightly negative pressure (a nominal draw of 1-2\" of water)

    		 
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