Degas/Regas/Ozone
  • Degas
  • Regas
  • Ozone
    		•
    EBARA's Dissolved Gas Water Generator

    The EBARA dissolved gas water generator is capable of continuously feeding clean dissolved gas water to meet the requirements of next-generation wet processes through the use of the by-pass fl ow control system, a hollow fi ber membrane and the particle-free pump.
  • Precisely controlled concentration, large volume of dissolved gas water supply
    • Systems are capable of providing dissolved gas water concentration between 5-15 mg/L (N2) or 0.1-1 mg/L (H2) at flows of 20-30 L/min.
  • Impurity free dissolved gas water
    • Use of the non-metal piping, a hollow fiber membrane and the particle free pump assist in the elimination of TOC and heavy metal impurities.
  • Superior concentration and flow rate stability
    • The use of an N2 or H2 monitor and the variable speed particle free pump allows for accurately controlled dissolved gas concentration and constant flow of the dissolved gas water supply.
  • Superior ease and safe operation ideally suited for production
    • Touch-screen operation panel.
    • External control signals allow for local or remote control.
    • S2-93 compliant design. CE model available.
  • Basic operation of RGW units:
    • Ultra pure water is pumped through the hollow fiber membrane by the EBARA non-particle pump at the same time raw gas is also introduced to the hollow fiber membrane, thus producing stable dissolved gas water.

  • Emphasizing megasonic cleaning power
  • Particle removal

    • MODELFLOW RATE (LPM)CONCENTRATION (PPM)
    RGW20N205 – 15(N2)
    RGW20H200.1 – 1(H2)
    RGW30N305 – 15(N2)
    RGW30H300.1 – 1(H2)

    		 
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