Our poppet valves are fully opening for high conductance and to prevent bellows contamination while the valve is in the open position, reducing particle contamination when the valve is cycled. Our bodies are dieformed from 304 stainless steel to eliminate sharp inside corners and improve conductance. The valves are electropolished for lower outgassing and better corrosion resistance. The welded bellows are made from AM-350 stainless steel to provide excellent corrosion resistance and flexibility. They are designed with additional segments to provide extended life.
Ball valves are a low cost, manually operated, straight through isolation device. Their simple, robust design provides high reliability in “dirty” applications. They are commonly used on MOC VD and CVD equipment downstream from the chamber or vacuum pump to isolate traps or abatement tools. A forged 316L stainless steel body and Teflon seat make these valves ideal for corrosive environments. Other applications include vacuum and other facilities requirements.
Linear Gate Valves
Our linear gate valves have an ultra-slim profile, which makes them perfect for applications where space is limited, and their smaller volume results in lower outgassing and faster pumpdown. Larger sizes have a unique feature in the actuator, which dampens the vibration, which can arise when the gate is opened. This makes these valves ideal for semiconductor and other vibration sensitive processes.
Ebara's bakeable all-metal seal angle valves are intended for use in UHV or cryogenic applications where temperature extremes preclude the use of our elastomer seal valves. Approved for use in beamline facilities, these valves have a temperature operating range from -250°C to 400°C.