EBARA's Products

EBARA's Products

EBARA Technologies Incorporated's Component Division is a supplier of advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D. EBARA Technologies provides leading edge exhaust management solutions consisting of dry vacuum pumps, turbomolecular pumps, point-of-use abatement, exhaust line heaters, vacuum hardware and related services.

EBARA Technologies Incorporated's Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing. EBARA is a leading supplier of 200 mm and 300mm Chemical Mechanical Polishing systems (CMP), advanced Wafer Plating Systems, Bevel and Backside Clean Treatment Systems.

All-in-one Systems
Chemical Mechanical Polishing
Degas/Regas/Ozone
Dry Pumps
Foreline Traps
Gauges
Monitoring Systems
Point-of-Use Abatement
Special Pumps
Thermal Solutions
Turbomolecular Pumps
Vacuum Hardware
Vacuum Valves
Wafer Plating Systems

 
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