Our Applications Engineering groups located in Japan and the U.S. continue to push the envelope of the challenges required for tomorrow's devices. Whether this entails working on copper and low k dielectric planarization or 300mm, EBARA has a CMP model that meets your need.
EBARA has maintained its commitment to 300mm when many companies elected to postpone their programs. EBARA now offers two models of 300mm CMP systems, ready to lead the way with the key enabling technology. EBARA is prepared to demonstrate our 300mm tool in either an R&D environment or in high volume production today.
EBARA CMP - FREX200 and FREX300 are the enhanced versions of our dry in/dry out integrated clean CMP system. The FREX200 offers a two-head, two-platen design with an optional buff station for greater process flexibility and increased throughput. The FREX300 offers a two-head, two-platen and two-buff stations design, which allows for a customized process recipes and 40% increase in throughput.