EBARA Ozone-Related equipment includes the Ultra High Concentration Clean Ozonizer (Ozone Gas Generator, OZC) which produces high concentrations of virtually impurity free ozone gas by using a unique trench discharge cell system developed EBARA.

The Ozonized Water Generator (OZW) supplies contamination-free ozonized water, and the De-Gas/Re-Gas/OZW system (DRO).