Thermal Oxidation is an effective flexible abatement solution for effluent gas abatement. Pure Air Systems Inc. has been a pioneer in the development of pyrophoric gas abatement technologies since 1999. Integrating thermal oxidation with dynamic oxidation provides a safe, efficient and low cost effective abatement solution for toxic, flammable and global warming gases used extensively in Semiconductor, Photovoltaic /Solar and Thin Film Solar manufacturing processes. Managing the particles can be at integrated at point-of-use in the system or scaled up to a facility system. The thermal oxidation units can be fitted with a mechanical filter (E.DOC-TH-F), no filters (E.DOC-TH Cyclone) or water scrubber (E.DOC-TH-SC) to handle any water soluble gases.