Point-of-Use Abatement
Wet Scrubbing
EBARA's Point-of-Use Abatement Wet Scrubbing

With more than 1000 scrubbers in the field servicing Silicon Epitaxial, Metal Etch, Poly Etch and CVD process abatement applications, it is no wonder that Airgard’s wet scrubbers are world renowned. Unrivaled in efficiency, the Airgard wet scrubber removes >99.99% of water-soluble gases by using a special combination of a patented non-clogging gas inlet device, high flow spray chambers and a unique packed column design.

Model V
Model C
 
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