The ThermaGas® Process, developed by ASC2T, is a cleaning technique that utilizes High Temperatures, Reactive Gases and Vacuum to remove the contaminated residue from parts used in semiconductor manufacturing. This process is especially useful on parts made from ceramic or graphite materials. It is much more cost effective and environmentally friendly than traditional methods using media blasting and wet chemical etchants.
Get 10 or more cleans on contaminated components such as planetary, satellites, pull down, collector ring, tension disk, gas shower head, star and other MOCVD hardware. ThermaGas® cleaning process can be applied to graphite, Silicon Carbide coated graphite, carbon coated graphite or solid Silicon Carbide. The ability to recycle your hardware allows for reductions in inventory costs, reduce down times, less need for re-qualification of new parts and substantial reduction in new tooling purchases. In all cases the material is returned with an equal or better purity levels (less than 3 ppm).