EBARA Technologies, Inc.

EBARAClean is an enhanced parts cleaning and assembly solutionthat exists to extend parts use and performance with superior cost savings. EBARA offers a wide range of parts cleaning capabilities ranging from media blasting to ultrasonic and ThermaGas® cleaning (by ASC²T). The fully customizable EBARAClean kit managementsystem enables our customers to extend the life of their parts, create a more predictable PM schedule and most importantly cut operation costs by refurbishing and recycling existing parts and assemblies.

The EBARAClean system encompasses all aspects of cleaning, coating and refurbishment to inventory and cost control. EBARA offers fast service response time as well as pickup and delivery services to reduce your inventory without any worry of part shortages during the manufacturing process.

EBARA's ISO Quality Assurance program guarantees your parts will be treated with the utmost care providing a complete critical dimension report that meets your needs. Our web based part status reporting provides you with up to the minute tracking and history for all of your parts during the cleaning process. EBARAClean provides fast, consistent, reliable cleaning services. EBARA Technologies is committed to providing a total sub-fab solution based on servicing your products, enabling the end-user to focus on what you do best � manufacturing!

Services
Applications
ASC²T ThermaGas®

Chemical Cleaning / Stripping / Solvents Cleaning

Part Surface Treatments

Copper Segregation

Decontamination

CO2 Cleaning

Media Blasting (Parts Surface Texturing)

DI Water Ultrasonic Cleaning

ThermaGas�

EBARAClean Kit Management System

In House Machining and Welding

Hermetically Sealed Packaging

Nitrogen Purge Oven Drying

Local Pickup & Delivery �

Large Parts Capabilities

Optical Quartz Fiber Pulling

Solar Cell Panel Fabrication

Molecular Beam Epitaxy

RF & IR Thermal Epitaxy

Flat Panel Display

Crystal Pulling

Ion-Implant

Si Nitriding

MOCVD

SIMOX

MBE

CVD

Etch

The ThermaGas® Process, developed by ASC²T, is a cleaning technique that utilizes High Temperatures, Reactive Gases and Vacuum to remove the contaminated residue from parts used in semiconductor manufacturing. This process is especially useful on parts made from ceramic or graphite materials. It is much more cost effective and environmentally friendly than traditional methods using media blasting and wet chemical etchants.

Get 10 or more cleans on contaminated components such as planetary, satellites, pull down, collector ring, tension disk, gas shower head, star and other MOCVD hardware. ThermaGas® cleaning process can be applied to graphite, Silicon Carbide coated graphite, carbon coated graphite or solid Silicon Carbide. The ability to recycle your hardware allows for reductions in inventory costs, reduce down times, less need for re-qualification of new parts and substantial reduction in new tooling purchases. In all cases the material is returned with an equal or better purity levels (less than 3 ppm).