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EBARA Technologies, Inc.
 
 
 
Service & Support
  • Repair & Remanufacturing
  • Field Service
  • Non-EBARA Product Services
  • EBARAClean
  • Systems Services
  • Training & Demo Facility
  • Refurbished Pumps
    		•
    EBARA's Systems Services
  • Located in Sacramento, CA
  • Class 10 Cleanroom
  • Staffed by CMP Engineers
  • Customer Process Testing
  • Systems Reliability Testing
  • Customer Evaluations
  • Data Packages
    • Consumables Support (Development, Testing, Evaluation)
      • Retaining Ring Material & Design Studies
      • Conditioning Products Evaluations
      • Pad Development and Testing
      • Others
  • FREX 300 - 300mm
    • ai Head G2/G2S
    • aiHead G3
    • TCM (R-ECM); S-OPM; ME-20
  • EPO112T – 300mm
    • Standard Head
  • EPO 112 – 200/150mm
    • Standard & aiHead G1/G2
  • Defects: SP1 TBI 200mm and 300mm
  • Topography( Dishing, Erosions, Planarity): HRP 320 200mm and 300mm
  • Film Thickness: Nanospec 8300 200mm and 300mm; UV1050 200mm; CDE 465 4 point probe 200mm and 300mm.
  • Wafer Inspection: Olympus defect renew station up to 1000X, 150mm 200mm and 300mm
    		•
    Engineering Lab
    Engineering Lab
    		 
    © 2013 - EBARA Technologies