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CF Flanges, Fittings and Hardware

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Ebara CF flanges are compatible with other Conflat style flanges and are available in sizes from 1-1/3 to 16-1/2 inch OD for 1/4 to 14 inch tube diameters. Flanges 41/2 inch OD and smaller are made from 304 electroslag remelt (ESR) bar stock. ESR is a refining process that produces stainless steel with higher purity, fewer inclusions and more uniform grain structure to eliminate microscopic leak paths. Larger CF flanges are made from Argon Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112. Maximum inclusion size is 2.5 per ASTM E-45. Normally our standard CF material is in the low carbon range for 304 stainless steel. As specials 304L and 316L material can be supplied in AOD or roll-forged rings.

Machining is consistent with good UHV practice. Machine coolant is sulfur free to reduce outgassing. State-ofthe- art CNC machine centers are used to produce flanges with consistent high quality. Flanges are machine washed in approved aqueous detergent after machining. Chem-cleaning and clean room packaging are available.

CF flanges utilize an OFHC copper gasket to produce a vacuum tight seal up to 10-13 Torr, even when baked repeatedly to 450ºC. When the copper gasket is compressed between the knife edges of CF flanges, its material flows laterally to fill surface imperfections. Ebara offers CF flanges in rotatable as well as nonrotatable versions. (Refer to diagram on page 48.) When components of several systems are used interchangeably, the use of rotatable flanges is recommended. Assembly is facilitated by rotating the receiver portion of the flange to align its bolt holes with those of the mating flange. The insert is welded to the tube or component and contains the knife edge portion of the CF flange.

Nonrotatable CF flanges, unlike rotatable, contain both sealing surface and bolt holes in one unit. This makes the nonrotatable flange less expensive, and therefore the preferred choice when mating component orientation is not a concern. All fittings are priced with a rotatable flange opposing a nonrotatable. For fittings with all nonrotatable flanges subtract the difference in price between a rotatable and nonrotatable flange of the desired size multiplied by the number of additional nonrotatable flanges.

Applications:

Specifications:
SPECIFICATIONS
General: Rotatable or nonrotatable flanges with tapped or clearance bolt holes
Nominal OD sizes: 1-1/3 to 16-1/2 inches
Tube sizes: 1/4 to 14 inches
Materials
   Flange: 304 stainless steel (316L available on request)
   Gaskets: Viton, copper or silver plated
   Bolts: 18-8 stainless steel or silver plated
Vacuum range: 
   Metal seal: >= 1 x 10-13 Torr - UHV
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
Temperature range: 
   Metal seal: -200°C to 450°C 
   Elastomer seal: -20°C to 150°C 




CF Mini Flange:
 
MODEL NUMBERTYPEDIAGRAMABOLT
HOLES
DIAMETER
OR THREAD
133-000NBlankA-6.172
133-000NKBlank weld neck with >weld prepG-6.172
133-025NBoredD0.2556.172
133-038NBoredD0.3806.172
133-050NBoredD0.5056.172
133-075NCounterbored for tube ODE0.6256.172
133-075NKBored weld neck with weld prepG0.6256.172
133-075NBKBored weld neck without weld prepF0.6256.172
133-000NTBlankA-68-32
133-000NKTBlank weld neck with weld prepG-68-32
133-025NTBoredD0.25568-32
133-038NTBoredD0.38068-32
133-050NTBoredD0.50568-32
133-075NTCounterbored for tube ODE0.62568-32
133-075NKTBored weld neck with weld prepG0.62568-32
133-075NBKTBored weld neck without weld prepF0.62568-32
133-000RBlankB-6.172
133-000RKBlank weld neck with weld prepH-6.172
133-025RBoredC0.2556.172
133-038RBoredC0.3806.172
133-050RBoredC0.5056.172
133-075RBoredC0.6256.172
133-075RKBored weld neck with weld prepH0.6256.172
133-075RBKBored weld neck without weld prepI0.6256.172
133-000RTBlankB-68-32
133-000RKTBlank weld neck with weld prepH-68-32
133-025RTBoredC0.25568-32
133-038RTBoredC0.38068-32
133-050RTBoredC0.50568-32
133-075RTBoredC0.62568-32
133-075RKTBored weld neck with weld prepH0.62568-32
133-075RBKTBored weld neck withou weld prepI0.62568-32

CF 2 1/8 Inch OD Flange:

CF 2 3/4 Inch OD Flange:

CF 3 3/8 Inch OD Flange:

CF 4 1/2 Inch OD Flange:

CF 4 5/8 Inch OD Flange:

CF 6 Inch OD Flange:

CF 6 3/4 Inch OD Flange:

CF 8 Inch OD Flange:

CF 10 Inch OD Flange:

CF 12 Inch OD Flange:

CF 13 1/4 Inch OD Flange:

CF 14 Inch OD Flange:

CF 14 1/2 Inch OD Flange:

CF 16 1/2 Inch OD Flange:


Description:
CF flanges are available with tapped or untapped holes. Tapped flanges are available in UNC /UNF or metric threads. Tapped flanges have through holes, so bolts may protrude slightly from the back of the flange when fastened to an untapped flange. Untapped CF flanges can be fastened to each other with stainless steel bolts and hex nuts or plate nuts. Plate nuts center themselves over two adjacent holes and can be held in place with one finger while the bolts are tightened. They are available for most flange sizes from 1-1/3 to 10 inch ODs. As an alternative to hex head bolts, 12-point bolts are available for CF flanges from 2-3/4 to 10 inch ODs. Silver plated bolts eliminate the need for anti-seize compound in clean room environments.

CF Mini Flange:
MODEL NUMBERDESCRIPTION
G-133 (10) OFHC copper gaskets
G-133-SP (10) Silver plated copper gaskets
G-133V (5) Viton gaskets
B-133 (25) SS 8-32 x .75" bolts, nuts & washers
B-133T (25) SS 8-32 x .56" bolts & washers
B-133-SP (25) Silver plated SS 8-32 x .75" bolts, nuts & washers
B-133T-SP (25) Silver plated SS 8-32 x .56" bolts & washers
NP-075 (24) 8-32 plate nuts
KNP-075 (12) Plate nuts and (24) 8-32 x .75" bolts

CF 2 1/8 Inch OD Flange:

CF 2 3/4 Inch OD Flange:

CF 3 3/8 Inch OD Flange:

CF 4 1/2 Inch OD Flange:

CF 4 5/8 Inch OD Flange:

CF 6 Inch OD Flange:

CF 6 3/4 Inch OD Flange:

CF 8 Inch OD Flange:

CF 10 Inch OD Flange:

CF 12 Inch OD Flange:

CF 13 1/4 Inch OD Flange:

CF 14 Inch OD Flange:

CF 14 1/2 Inch OD Flange:

CF 16 1/2 Inch OD Flange:


Description:
Ebara's new Aluminum to Stainless Steel Transitions provide a reliable UHV seal for aluminum vacuum systems. An explosion bonded composite of aluminum, stainless steel and two other UHV materials make these transitions leak tight at UHV pressures. Transitions are welded to a stainless steel CF flange as a complete unit ready to weld to your aluminum chamber or beamline, or the transition can be purchased separately for welding to your own CF flange.

The explosion bonds have been tested for tensile, shear and thermal stress. Testing included thermal quenching from 773ºK to 77°K. This process has shown vacuum integrity to better than 5 x 10-10 standard cc per second with wall thickness as thin as 0.025". Each unit is thermally cycled to 300°C. Helium leak testing is done before and after thermal cycling.

CF Aluminum to Stainless Steel Transitions:

MODEL NUMBERDESCRIPTIONABCDE
ALST-075-CFNonrotatable CF1.330.500.7502.201.00
ALST-075Transition only-0.500.750-1.00
ALST-150-CFNonrotatable CF2.731.251.5001.911.75
ALST-150Transition only-1.251.500-1.75
ALST-250-CFNonrotatable CF4.472.252.5002.082.75
ALST-250Transition only-2.252.500-2.75
ALST-400-CFNonrotatable CF5.973.754.0002.144.25
ALST-400Transition only-3.754.000-4.25
ALST-600-CFNonrotatable CF7.975.756.0002.206.25
ALST-600Transition only-5.756.000-6.25
ALST-800-CFNonrotatable CF9.977.758.0002.208.25
ALST-800Transition only-7.758.000-8.25

Applications:


Description:
Ebara manufactures plate nuts for most sizes of CF flanges from 1-1/3 to 10 inches OD. These handy backing nuts center themselves over two adjacent bolt holes on the back side of a flange and can be held in place with one finger while bolts are tightened with a single wrench. Plate nuts are perfect for those hard to reach (and see) spaces that are encountered during system assembly and service.

CF Nut Plates:
MODEL NUMBERFLANGE
OD
THREAD
SIZE
ABCD
NP-0751-1/38-320.800.30.530.15
NP-1502-3/41/4-281.590.51.150.18
NP-2003-3/85/16-241.750.51.090.22
NP-2504-1/25/16-242.030.51.390.22
NP-3004-5/85/16-241.750.51.250.22
NP-40065/16-241.750.51.000.22
NP-60085/16-241.750.51.120.22
NP-800105/16-241.750.51.190.22

CF Plate Nut Assembly Kits with Hex Head Bolts:

Plate Nut Assembly Kits with 12-pt. Bolts:


Description:
Ebara manufactures a complete line of vacuum fittings with CF flanges. The tube portions are fabricated from 304 stainless steel. On request 316L stainless steel can be supplied. Nor-Cal makes its own elbows, and all tees and crosses are made with the pulled port technique. This allows smooth, crevice-free butt welds to provide the maximum in cleanliness for UHV applications. Bakeout range is up to 450°C.

Standard finish is bead blasted. Electropolish can also be provided as an option. Call for pricing.

CF Half Nipple:
MODEL NUMBERFLANGE
OD
TUBE
OD
A
1N-0751.333/41.50
1N-1002.1212.05
1N-1502.7511/22.46
1N-2003.3823.22
1N-2504.5021/23.38
1N-250V4.5021/24.12
1N-3004.6233.53
1N-4006.0044.32
1N-400V6.0045.31
1N-6008.0065.50
1N-600V8.0066.56
1N-80010.0087.50
1N-100013.251010.00
1N-120014.001210.00

CF Full Nipple:

CF Reducer Nipple:

CF Conical Reducer Nipple:

CF 45° Radius Elbow with Tangents:

CF 90° Radius Elbow:

CF 90° Mitered Elbow:

CF Tee:

CF 4-Way Reducer Tee:

CF Reducer Crosses:

CF 6-Way Cube Cross:

CF 4-Way Cross:

CF 5-Way Cross:

CF 6-Way Cross:


Description:
Ebara's double-sided flanges are identical to standard CF flanges except the same gasket-sealing detail is machined into both faces of the flange. These flanges can be inserted between like-sized flanges as spacers, orifice plates, or when radially drilled, as custom penetrations into vacuum systems.

CF Double-Sided:

MODEL NUMBERNOMINAL
OD
MADE
FROM
AB
133-000D1-1/3133-000N-0.300
133-025D1-1/3133-000N0.2550.300
133-038D1-1/3133-000N0.3800.300
133-050D1-1/3133-000N0.5050.300
133-075D1-1/3133-000N0.6300.300
133-000DS1-1/3133-000NS-0.500
133-075DS1-1/3133-000NS0.6300.500
212-000D2-1/8212-000N-0.470
212-100D2-1/8212-000N1.0100.470
275-000D2-3/4275-000N-0.500
275-025D2-3/4275-000N0.2550.500
275-050D2-3/4275-000N0.5050.500
275-075D2-3/4275-000N0.7600.500
275-100D2-3/4275-000N1.0100.500
275-125D2-3/4275-000N1.2600.500
275-150D2-3/4275-000N1.5100.500
275-000DS2-3/4275-000NS-0.750
275-150DS2-3/4275-000NS1.5100.750
338-000D3-3/8338-000N-0.687
338-150D3-3/8338-000N1.5100.687
338-200D3-3/8338-000N2.0100.687
450-000D4-1/2450-000N-0.687
450-150D4-1/2450-000N1.5100.687
450-200D4-1/2450-000N2.0100.687
450-250D4-1/2450-000N2.5100.687
462-000D4-5/8462-000N-0.812
462-300D4-5/8462-000N3.0100.812
600-000D6600-000N-0.781
600-400D6600-000N4.0100.781
675-000D6-3/4675-000N-0.844
675-500D6-3/4675-000N5.0100.844
800-000D8800-000N-0.875
800-600D8800-000N6.0200.875
1000-000D101000-000N-0.968
1000-800D101000-000N8.0200.968
1325-000D13-1/41325-000N-1.125
1325-1000D13-1/41325-000N10.0201.125
1400-000D141400-000N-1.125
1400-1200D141400-000N12.0201.125

CF Double-Sided Hardware:


Description:
Ebara's special purpose CF flanges are used as roughing accessories, accommodating thermocouple gauge tubes, up-to-air valves and/or NPT threaded fittings. Double-sided flanges are provided with one or more radially tapped holes. Blank flanges are provided with a single concentric 1/8 NPT tapped hole. Hardware for special purpose flanges is located on the appropriate flange size pages.

CF Double-Sided Special Purpose Flanges:
MODEL NUMBERFLANGE
OD
FEATUREDIAGRAMAB
133-D11.331/16" NPT holeA0.250.5
275-D12.751/8" NPT holeA0.380.75
133-D21.331/16" NPT holesB0.250.5
275-D22.751/8" NPT holesB0.380.75
133-DT1.33Thermocouple gauge tubeC0.250.5
275-DT2.75Thermocouple gauge tubeC0.380.75
133-DV1.33Up-to-air valveD0.250.5
275-DV2.75Up-to-air valveD0.380.75
133-DV-1/4 MVCR1.33Up-to-air valve & 1/4" Cajon male VCR fitting on valveD0.250.5
275-DV-1/4 MVCR2.75Up-to-air valve & 1/4" Cajon male VCR fitting on valveD0.380.75
133-DV-1/4 FVCR1.33Up-to-air valve & 1/4" Cajon female VCR fitting on valveD0.250.5
275-DV-1/4 FVCR2.75Up-to-air valve & 1/4" Cajon female VCR fitting on valveD0.380.75
133-DV-1/4 SWAG1.33Up-to-air valve & 1/4" Swagelok fitting on valveD0.250.5
275-DV-1/42.75Up-to-air valve & 1/4" Swagelok fitting on valveD0.380.75
133-D1V1.33(1) 1/16" NPT hole & up-to-air valveF0.250.5
275-D1V2.75(1) 1/16" NPT hole & up-to-air valveF0.380.75
133-DTV1.33Thermocouple gauge tube & up-to-air valveE0.250.5
275-DTV2.75Thermocouple gauge tube & up-to-air valveE0.380.75
133-DTV-1/4 MVCR1.33Thermocouple gauge tube & up-to-air valve with 1/4"
Cajon male VCR fitting on valve
E0.250.5
275-DTV-1/4 MVCR2.75Thermocouple gauge tube & up-to-air valve with 1/4"
Cajon male VCR fitting on valve
E0.380.75
133-DTV-1/4 FVCR1.33Thermocouple gauge tube & up-to-air valve with 1/4"
Cajon female VCR fitting on valve
E0.250.5
275-DTV-1/4 FVCR2.75Thermocouple gauge tube & up-to-air valve with 1/4"
Cajon female VCR fitting on valve
E0.380.75
133-DTV-1/4 SWAG1.33Thermocouple gauge tube & up-to-air valve with 1/4"
Swagelok fitting on valve
E0.250.5
275-DTV-1/4 SWAG2.75Thermocouple gauge tube & up-to-air valve with 1/4"
Swagelok fitting on valve
E0.380.75
275-DS-MINI2.75(1) 1.33" OD side portG0.380.75

CF Straight-Through Special Purpose Flanges:


Description:
Ebara's zero length reducer flanges are a convenient and inexpensive way to reduce a large flange for smaller vacuum plumbing and/or component connection. To list all possible reducer combinations would require excessive space, therefore only the most commonly used reducers are listed. If your requirement is not listed, please inquire.

CF Zero Length Reducer Flanges:

MODEL NUMBERSMALL FLANGE
DETAIL
LARGE FLANGE
DETAIL
AB
212-133-075Z133-000NT212-000NT0.6250.470
275-133-075Z133-000NT275-000N0.6250.500
275-212-100Z212-000NT275-000NT1.0000.500
338-133-075Z133-000NT338-000N0.6250.687
338-212-100Z212-000NT338-000NT1.0000.687
338-275-150Z275-000NT338-000NT1.5000.687
450-133-075Z133-000NT450-000N0.6250.687
450-212-100Z212-000NT450-000N1.0000.687
450-275-150Z275-000NT450-000N1.5000.687
450-338-200Z338-000NT450-000NT2.0000.687
462-133-075Z133-000NT462-000N0.6250.812
462-212-100Z212-000NT462-000N1.0000.812
462-275-150Z275-000NT462-000N1.5000.812
462-338-200Z338-000NT462-000N2.0000.812
600-133-075Z133-000NT600-000N0.6250.781
600-212-100Z212-000NT600-000N1.0000.781
600-275-150Z275-000NT600-000N1.5000.781
600-338-200Z338-000NT600-000N2.0000.781
600-450-250Z450-000NT600-000N2.5000.781
600-462-300Z462-000NT600-000NT3.0000.781
675-133-075Z133-000NT675-000N0.6250.844
675-212-100Z212-000NT675-000N1.0000.844
675-275-150Z275-000NT675-000N1.5000.844
675-338-200Z338-000NT675-000N2.0000.844
675-450-250Z450-000NT675-000N2.5000.844
675-462-300Z462-000NT675-000N3.0000.844
675-600-400Z600-000NT675-000NT4.0000.844
800-133-075Z133-000NT800-000N0.6250.875
800-212-100Z212-000NT800-000N1.0000.875
800-275-150Z275-000NT800-000N1.5000.875
800-338-200Z338-000NT800-000N2.0000.875
800-450-250Z450-000NT800-000N2.5000.875
800-462-300Z462-000NT800-000N3.0000.875
800-600-400Z600-000NT800-000N4.0000.875
800-675-500Z675-000NT800-000NT5.0000.875
1000-133-075Z133-000NT1000-000N0.6250.968
1000-212-100Z212-000NT1000-000N1.0000.968
1000-275-150Z275-000NT1000-000N1.5000.968
1000-338-200Z338-000NT1000-000N2.0000.968
1000-450-250Z450-000NT1000-000N2.5000.968
1000-462-300Z462-000NT1000-000N3.0000.968
1000-600-400Z600-000NT1000-000N4.0000.968
1000-675-500Z675-000NT1000-000N5.0000.968
1000-800-600Z800-000NT1000-000N6.0000.968
1325-133-075Z133-000NT1325-000N0.6251.125
1325-212-100Z212-000NT1325-000N1.0001.125
1325-275-150Z275-100NT1325-000N1.5001.125
1325-338-200Z338-000NT1325-000N2.0001.125
1325-450-250Z450-000NT1325-000N2.5001.125
1325-462-300Z462-000NT1325-000N3.0001.125
1325-600-400Z600-000NT1325-000N4.0001.125
1325-675-500Z675-000NT1325-000N5.0001.125
1325-800-600Z800-000NT1325-000N6.0001.125
1325-1000-800Z1000-000NT1325-000N8.0001.125

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