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Degas

Degassed Water Generator

The EBARA degassed water generator is capable of continuously feeding clean degassed water to meet the requirements of next-generation wet processes through the use of the vacuum pump, a hollow fiber membrane and the particle-free pump (option).

Applications:

DEW Series

Product Features:

High degassing performance, large volume of dissolved gas water supply
- Systems are capable of providing degassed water concentration less than 1 μg/L (O2) and less than 1mg/L (N2) at fl ows up to 120 L/min.
- Impurity free dissolved gas water
  - Use of the non-metal piping, a hollow fiber membrane and the particle-free pump (option) assist in the elimination of TOC and heavy metal impurities.
- Obstructive gas free degassed water
  - The use of the materials, which prevents atmospheric gas going into degassed water through water path piping wall, allows obstructive gas free degassed water supply.
- Superior ease and safe operation ideally suited for production
  - Touch-screen operation panel.
  - External control signals allow for local or remote control.
  - S2-93 compliant design.
- Basic operation of DEW units:
  - Ultra pure water is supplied to the hollow fi ber membrane and degassed by vacuum pump from DI water through hollow fi ber membrane.

Model Performance Summary:

MODEL	FLOW RATE (LPM)	CONCENTRATION (PPM)
DEW40	40	<1ppm (N2) <1ppb(O2)
DEW60	60	<1ppm (N2) <1ppb(O2)
DEW120	120	<1ppm (N2) <1ppb(O2)

Applications:

Process Schematic:

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