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The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.
The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.
The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.
The Ultra high vacuum model turbomolecular pumps efficiently evacuate the lightest gases from high vacuum down to the ultra high vacuum region by reducing the materials' out gassing and improving the efficiency of hydrogen compression. The Ultra high vacuum model turbomolecular pump can achieve 75 pTorr (10-8 Pa) with a short bake-out period.
The Ultra Low Vibration model turbomolecular pumps meets today's cutting edge challenges in EUV lithography, Micro-machining (MEMS), CD line width measurement, SEM/TEM Electron Microscopy, XPS and Nano-technology analytical tools. The Ultra low vibration model turbomolecular pumps produce less than 1nm vibration amplitude.
Features & Benefits: | - Full Magnetic Bearing
- Installation in Any Orientation
- High Throughput
- Quick Starts and Stops
- Compact Size
- Serial Communication
- Automatic Calibration
- Rotational Speed Control
- Energy Savings
- Vibration Free
- Air or Water Cooled
- Safety Standards UL, CE, SEMI, NRTL
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Specifications: | | Flange | Inlet | ISO-B100 / CF100 | | Outlet | NW 25 | | Volume Flow Rate | N2 (L/s) | 340 | | H2 (L/s) | 320 | | Ar (L/s) | 290 | | Maximum Compression Ratio | N2 | 1x108 | | H2 | 4.5x103 | | Ultimate Pressure CF / ISO-B | Torr | < 7.5x10-9 | | Pa | < 1x10-6 | | Allowable Outlet Pressure | Torr | 3 | | Pa | 400 | | Maximum Throughput | N2 (sccm) | 2000 | | N2 (Pa x L/s) | 3680 | | Ar (sccm) | 700 | | Ar (Pa x L/s) | 1290 | | Revolution Speed | RPM | 40,800 | | Startup Time | Minutes | 2 - 3 | | Shutdown Time | Minutes | 4 - 5 | | Installation Position | | Any | | Vibration Level (0 - peak)7 | μm | < 0.01 | | Pump Bake Out Temperature | Deg C | Max 120 | | Bearing System | 5-axis magnetic bearing | | Cooling System | Water/Air | | Cooling Water Flow Rate | L/min | 1.5 | | Recommended Backing pump | L/min | ≥ 160 | | N2 Gas Throughput for Purging | sscm | 10 | | Pa-L/sec | 18.4 | | Weight ISO-B/CF | lb | 30/37 | | kg | 14/17 | |
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Specifications: | | Flange | Inlet | ISO-B160 / CF160 | | Outlet | NW 25 | | Volume Flow Rate | N2 (L/s) | 400 | | H2 (L/s) | 370 | | Ar (L/s) | 300 | | Maximum Compression Ratio | N2 | 1x108 | | H2 | 4.5x103 | | Ultimate Pressure CF / ISO-B | Torr | < 7.5x10-9 | | Pa | < 1x10-6 | | Allowable Outlet Pressure | Torr | 3 | | Pa | 400 | | Maximum Throughput | N2 (sccm) | 2000 | | N2 (Pa x L/s) | 3680 | | Ar (sccm) | 700 | | Ar (Pa x L/s) | 1290 | | Revolution Speed | RPM | 40,800 | | Startup Time | Minutes | 2 - 3 | | Shutdown Time | Minutes | 4 - 5 | | Installation Position | | Any | | Vibration Level (0 - peak)7 | μm | < 0.01 | | Pump Bake Out Temperature | Deg C | Max 120 | | Bearing System | 5-axis magnetic bearing | | Cooling System | Water/Air | | Cooling Water Flow Rate | L/min | 1.5 | | Recommended Backing pump | L/min | ≥ 160 | | N2 Gas Throughput for Purging | sscm | 10 | | Pa-L/sec | 18.4 | | Weight ISO-B/CF | lb | 30/37 | | kg | 14/17 | |
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Specifications: | | Flange | Inlet | ISO-B160 / CF160 | | Outlet | NW 40 | | Volume Flow Rate | N2 (L/s) | 900 | | H2 (L/s) | 860 | | Ar (L/s) | 1050 | | Maximum Compression Ratio | N2 | 1x108 | | H2 | 1.5x104 | | Ultimate Pressure CF / ISO-B | Torr | < 7.5x10-9 | | Pa | < 1x10-6 | | Allowable Outlet Pressure | Torr | 3.8 | | Pa | 500 | | Maximum Throughput | N2 (sccm) | 3000 | | N2 (Pa x L/s) | 5520 | | Ar (sccm) | 1500 | | Ar (Pa x L/s) | 2760 | | Revolution Speed | RPM | 33,600 | | Startup Time | Minutes | 4 - 5 | | Shutdown Time | Minutes | 4 - 5 | | Installation Position | | Any | | Vibration Level (0 - peak)7 | μm | < 0.005 | | Pump Bake Out Temperature | Deg C | Max 120 | | Bearing System | 5-axis magnetic bearing | | Cooling System | Water/Air | | Cooling Water Flow Rate | L/min | 1.5 | | Recommended Backing pump | L/min | ≥ 250 | | N2 Gas Throughput for Purging | sscm | 20 | | Pa-L/sec | 36.8 | | Weight ISO-B/CF | lb | 34/42 | | kg | 75/92 | |
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Specifications: | | Flange | Inlet | ISO-B200 / CF200 | | Outlet | NW 40 | | Volume Flow Rate | N2 (L/s) | 1300 | | H2 (L/s) | 1230 | | Ar (L/s) | 1200 | | Maximum Compression Ratio | N2 | 1x108 | | H2 | 1.5x104 | | Ultimate Pressure CF / ISO-B | Torr | < 7.5x10-9 | | Pa | < 1x10-6 | | Allowable Outlet Pressure | Torr | 3.8 | | Pa | 500 | | Maximum Throughput | N2 (sccm) | 3000 | | N2 (Pa x L/s) | 5520 | | Ar (sccm) | 1500 | | Ar (Pa x L/s) | 2760 | | Revolution Speed | RPM | 33,600 | | Startup Time | Minutes | 4 - 5 | | Shutdown Time | Minutes | 4 - 5 | | Installation Position | | Any | | Vibration Level (0 - peak)7 | μm | < 0.005 | | Pump Bake Out Temperature | Deg C | Max 120 | | Bearing System | 5-axis magnetic bearing | | Cooling System | Water/Air | | Cooling Water Flow Rate | L/min | 1.5 | | Recommended Backing pump | L/min | ≥ 250 | | N2 Gas Throughput for Purging | sscm | 20 | | Pa-L/sec | 36.8 | | Weight ISO-B/CF | lb | 34/42 | | kg | 75/92 | |
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Specifications: | | Flange | Inlet | ISO-B250 | | Outlet | NW 40 | | Volume Flow Rate | N2 (L/s) | 2400 | | H2 (L/s) | 2300 | | Ar (L/s) | 1100 | | Maximum Compression Ratio | N2 | 1x108 | | H2 | 1.4x103 | | Ultimate Pressure CF / ISO-B | Torr | < 7.5x10-9 | | Pa | < 1x10-6 | | Allowable Outlet Pressure | Torr | 1.5 | | Pa | 200 | | Maximum Throughput | N2 (sccm) | 3000 | | N2 (Pa x L/s) | 5520 | | Ar (sccm) | 2000 | | Ar (Pa x L/s) | 3680 | | Revolution Speed | RPM | 31,200 | | Startup Time | Minutes | 4 - 5 | | Shutdown Time | Minutes | 4 - 5 | | Installation Position | | Any | | Vibration Level (0 - peak)7 | μm | < 0.005 | | Pump Bake Out Temperature | Deg C | Max 120 | | Bearing System | 5-axis magnetic bearing | | Cooling System | Water/Air | | Cooling Water Flow Rate | L/min | 1.5 | | Recommended Backing pump | L/min | ≥ 500 | | N2 Gas Throughput for Purging | sscm | 20 | | Pa-L/sec | 36.8 | | Weight ISO-B/CF | lb | 99/118 | | kg | 45/54 | |
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Specifications: | | Flange | Inlet | ISO-B320 | | Outlet | NW 40 | | Volume Flow Rate | N2 (L/s) | 3200 | | H2 (L/s) | 3000 | | Ar (L/s) | 2700 | | Maximum Compression Ratio | N2 | 1x108 | | H2 | 3x104 | | Ultimate Pressure CF / ISO-B | Torr | < 7.5x10-9 | | Pa | < 1x10-6 | | Allowable Outlet Pressure | Torr | 3 | | Pa | 400 | | Maximum Throughput | N2 (sccm) | 2000 | | N2 (Pa x L/s) | 3680 | | Ar (sccm) | - | | Ar (Pa x L/s) | - | | Revolution Speed | RPM | - | | Startup Time | Minutes | - | | Shutdown Time | Minutes | - | | Installation Position | | Any | | Vibration Level (0 - peak)7 | μm | - | | Pump Bake Out Temperature | Deg C | - | | Bearing System | 5-axis magnetic bearing | | Cooling System | Water/Air | | Cooling Water Flow Rate | L/min | - | | Recommended Backing pump | L/min | ≥ 1500 | | N2 Gas Throughput for Purging | sscm | - | | Pa-L/sec | - | | Weight ISO-B/CF | lb | 176/211 | | kg | 80/96 | |
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