Turbo Pump Dry Pump
 

ESA Series Dry Vacuum Pumps

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The ESA Series consists of a two-stage main pump design engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.

The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

Features & Benefits:
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Variable pumping speed to match application requirements
  • High performance brushless DC motor on the booster pump
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked
ESA Series Dry Vacuum Pumps
Applications:





Specifications:
Pumping Speed 50/60 Hz
CFM
L/min
M3/Hr
88/106
2500/3000
150/180
Ultimate Pressure 50/60 Hz
mTorr
Pa
mBar
3.98*10-5/3.00*10-5
5.3/4.0
0.053/.04
Connection Gas Inlet NW 50
Gas Outlet NW 40
Power at Ultimate Pressure KW  
Maximum Power KW  
Cooling Water Requirements Min. Flow Rate
L/min
3.5

Bearing and Dilution N2

Bearing Seals
L/min
11
Cabinet Dimensions
LxWxH
inches
mm
35.4 x 15.5 x 19.7
900 x 394 x 500
Weight lbs
kg
528
240


Specifications:
Pumping Speed 50/60 Hz
CFM
L/min
M3/Hr
274/296
7000/8400
420/504
Ultimate Pressure 50/60 Hz
mTorr
Pa
mBar
3.00*10-6/2.03*10-6
0.4/0.27
0.004/0.0027
Connection Gas Inlet NW 50
Gas Outlet NW 40
Power at Ultimate Pressure KW  
Maximum Power KW  
Cooling Water Requirements Min. Flow Rate
L/min
3.5

Bearing and Dilution N2

Bearing Seals
L/min
15
Cabinet Dimensions
LxWxH
inches
mm
39.3 x 15.7 x 31.5
997 x 400 x 800
Weight lbs
kg
836
380


Specifications:
Pumping Speed 50/60 Hz
CFM
L/min
M3/Hr
706
20000
1200/504
Ultimate Pressure 50/60 Hz
mTorr
Pa
mBar
3.97533E-6
0.53
0.0053
Connection Gas Inlet NW 80
Gas Outlet NW 40
Power at Ultimate Pressure KW 3.4
Maximum Power KW 4
Cooling Water Requirements Min. Flow Rate
L/min
3.5

Bearing and Dilution N2

Bearing Seals
L/min
12
Cabinet Dimensions
LxWxH
inches
mm
38.2 x 15.7 x 31.9
970 x 400 x 810
Weight lbs
kg
902
410


Specifications:
Pumping Speed 50/60 Hz
CFM
L/min
M3/Hr
1,060
30,000
1,800
Ultimate Pressure 50/60 Hz
mTorr
Pa
mBar
4
0.53
0.0053
Connection Gas Inlet ISO 100
Gas Outlet NW 40
Power at Ultimate Pressure KW 7.3
Maximum Power KW 12.5
Cooling Water Requirements Min. Flow Rate
L/min
6

Bearing and Dilution N2

Bearing Seals
L/min
5
Cabinet Dimensions
LxWxH
inches
mm
43.7 x 24.4 x 35.6
1110 x 620 x 905
Weight lbs
kg
1543
700

Performance:

Drawings:


Specifications:
Pumping Speed 50/60 Hz
CFM
L/min
M3/Hr
1766
50000
3000
Ultimate Pressure 50/60 Hz
mTorr
Pa
mBar
7.5*10-6
1
0.01
Connection Gas Inlet ISO 100
Gas Outlet NW 50
Power at Ultimate Pressure KW 6.7
Maximum Power KW 24.1
Cooling Water Requirements Min. Flow Rate
L/min
6

Bearing and Dilution N2

Bearing Seals
L/min
6
Cabinet Dimensions
LxWxH
inches
mm
60.5 x 24.4 x 41.1
1537 x 620 x 1045
Weight lbs
kg
1650
750

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