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The ESA Series consists of a two-stage main pump design engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.
The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.
Features & Benefits: | - Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
- Variable pumping speed to match application requirements
- High performance brushless DC motor on the booster pump
- State-of-the-art control and monitoring devices
- Idle mode can be employed for increased utility savings
- SEMI S2 assessed, NRTL Listed, CE Marked
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Specifications: | Pumping Speed 50/60 Hz | CFM L/min M3/Hr | 88/106 2500/3000 150/180 | Ultimate Pressure 50/60 Hz | mTorr Pa mBar | 3.98*10-5/3.00*10-5 5.3/4.0 0.053/.04 | | Connection | Gas Inlet | NW 50 | | Gas Outlet | NW 40 | | Power at Ultimate Pressure | KW | | | Maximum Power | KW | | | Cooling Water Requirements | Min. Flow Rate L/min | 3.5 | Bearing and Dilution N2 | Bearing Seals L/min | 11 | Cabinet Dimensions LxWxH | inches mm | 35.4 x 15.5 x 19.7 900 x 394 x 500 | | Weight | lbs kg | 528 240 | |
Specifications: | Pumping Speed 50/60 Hz | CFM L/min M3/Hr | 274/296 7000/8400 420/504 | Ultimate Pressure 50/60 Hz | mTorr Pa mBar | 3.00*10-6/2.03*10-6 0.4/0.27 0.004/0.0027 | | Connection | Gas Inlet | NW 50 | | Gas Outlet | NW 40 | | Power at Ultimate Pressure | KW | | | Maximum Power | KW | | | Cooling Water Requirements | Min. Flow Rate L/min | 3.5 | Bearing and Dilution N2 | Bearing Seals L/min | 15 | Cabinet Dimensions LxWxH | inches mm | 39.3 x 15.7 x 31.5 997 x 400 x 800 | | Weight | lbs kg | 836 380 | |
Specifications: | Pumping Speed 50/60 Hz | CFM L/min M3/Hr | 706 20000 1200/504 | Ultimate Pressure 50/60 Hz | mTorr Pa mBar | 3.97533E-6 0.53 0.0053 | | Connection | Gas Inlet | NW 80 | | Gas Outlet | NW 40 | | Power at Ultimate Pressure | KW | 3.4 | | Maximum Power | KW | 4 | | Cooling Water Requirements | Min. Flow Rate L/min | 3.5 | Bearing and Dilution N2 | Bearing Seals L/min | 12 | Cabinet Dimensions LxWxH | inches mm | 38.2 x 15.7 x 31.9 970 x 400 x 810 | | Weight | lbs kg | 902 410 | |
Specifications: | Pumping Speed 50/60 Hz | CFM L/min M3/Hr | 1766 50000 3000 | Ultimate Pressure 50/60 Hz | mTorr Pa mBar | 7.5*10-6 1 0.01 | | Connection | Gas Inlet | ISO 100 | | Gas Outlet | NW 50 | | Power at Ultimate Pressure | KW | 6.7 | | Maximum Power | KW | 24.1 | | Cooling Water Requirements | Min. Flow Rate L/min | 6 | Bearing and Dilution N2 | Bearing Seals L/min | 6 | Cabinet Dimensions LxWxH | inches mm | 60.5 x 24.4 x 41.1 1537 x 620 x 1045 | | Weight | lbs kg | 1650 750 | |
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