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EST Series Dry Vacuum Pumps
Specifications Service & Repair Request Quote Related Products



The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.

The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is onstructed of NiResist, a solid cast material known for its superior corrosion resistance.

Features & Benefits:
  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • High performance brushless DC motors
  • State-of-the-art control and monitoring devices
  • SEMI S2 assessed, NRTL Listed, CE Marked
 EST Series Dry Vacuum Pumps
Applications:





Specifications:
Pumping Speed 50/60 Hz
 CFM
L/min
M3/Hr		 88
2,500
150
Ultimate Pressure 50/60 Hz
 mTorr
Pa
mBar
20
2.67
0.267
Connection Gas Inlet NW 40
Gas Outlet NW 40
Power at Ultimate Pressure KW 3
Maximum Power KW 5.5
Cooling Water Requirements Min. Flow Rate
L/min		 5

Bearing and Dilution N2

 Bearing Seals
L/min		 8 to 10
Cabinet Dimensions
LxWxH 		inches
mm		 39 x 16 x 19.7
990 x 410 x 501
Weight lbs
kg		 661
300

Performance:

Drawings:


Specifications:
Pumping Speed 50/60 Hz
 CFM
L/min
M3/Hr		 176 - 353
5,000 - 10,000
300 - 600
Ultimate Pressure 50/60 Hz
 mTorr
Pa
mBar
3
0.4
0.004
Connection Gas Inlet ISO 100
Gas Outlet NW 40
Power at Ultimate Pressure KW 3.8
Maximum Power KW 7.7
Cooling Water Requirements Min. Flow Rate
L/min		 5

Bearing and Dilution N2

 Bearing Seals
L/min		 14 to 17
Cabinet Dimensions
LxWxH 		inches
mm		 39 x 16 x 33.5
990 x 410 x 851
Weight lbs
kg		 926
420

Performance:

Drawings:


Specifications:
Pumping Speed 50/60 Hz
 CFM
L/min
M3/Hr		 353 - 706
10,000 - 20,000
600 - 1,200
Ultimate Pressure 50/60 Hz
 mTorr
Pa
mBar
3
0.4
0.004
Connection Gas Inlet ISO 100
Gas Outlet NW 40
Power at Ultimate Pressure KW 3.9
Maximum Power KW 7.8
Cooling Water Requirements Min. Flow Rate
L/min		 5

Bearing and Dilution N2

 Bearing Seals
L/min		 14 to 17
Cabinet Dimensions
LxWxH 		inches
mm		 39 x 16 x 33.5
990 x 410 x 851
Weight lbs
kg		 992
450

Performance:

Drawings:


Specifications:
Pumping Speed 50/60 Hz
 CFM
L/min
M3/Hr		 520 - 1,060
15,000 30,000
900 - 1,800
Ultimate Pressure 50/60 Hz
 mTorr
Pa
mBar
3
0.4
0.004
Connection Gas Inlet ISO 160
Gas Outlet NW 40
Power at Ultimate Pressure KW 4.5
Maximum Power KW 9.5
Cooling Water Requirements Min. Flow Rate
L/min		 5

Bearing and Dilution N2

 Bearing Seals
L/min		 14 to 17
Cabinet Dimensions
LxWxH 		inches
mm		 39 x 20.5 x 34.4
990 x 520 x 873
Weight lbs
kg		 1102
500

Performance:

Drawings:


Specifications:
Pumping Speed 50/60 Hz
 CFM
L/min
M3/Hr		 883 - 1766
25,000 - 50,000
1,500 - 3,000
Ultimate Pressure 50/60 Hz
 mTorr
Pa
mBar
3
0.4
0.004
Connection Gas Inlet ISO 160
Gas Outlet NW 40
Power at Ultimate Pressure KW 4.6
Maximum Power KW 11.3
Cooling Water Requirements Min. Flow Rate
L/min		 5

Bearing and Dilution N2

 Bearing Seals
L/min		 16 to 18
Cabinet Dimensions
LxWxH 		inches
mm		 39 x 20.5 x 34.4
990 x 520 x 873
Weight lbs
kg		 1212
550

Performance:

Drawings:


Specifications:
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