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Notification of Safety issue with EBARA Turbo Molecular Pumps
The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series.
The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr.
The ET-WS Series turbomolecular pumps also offer a temperature controlled model, and the ET-WS (-A) model turbomolecular pumps has been designed for etching applications.
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Specifications: | | Flange | Inlet | VG 100 | Outlet
| NW 25 | Pumping Speed
| N2 (L/S) | 270 | | Maximum Compression Ratio | N2 | > 109 | | H2 | 7 x 103 | | Ultimate Pressure | Torr | < 7.5 x 10-9 | Allowable Outlet Pressure
| Pa (Torr) | 400 (3) | | Revolution Speed | RPM | 48,000 | Run-Up Time | Minutes | 6 | | Installation Position | | Any | | Vibration Level | um 0-p | < 0.01 | | Pump Bake Out Temperature | Deg C | max 100 | | Bearing System | | 5-axis magnetic bearing | | Cooling System | | water | | Cooling Water Flow Rate | L / min | > 2 | | N2 Gas Throughput for Purging | Pa-L/Sec
(sccm) | 85
(50) | | Weight | kg | 15 | | Controller Model | 306W-TF | | Input Voltage | VAC | 100-240 | | Frequency | Hz | 50/60 | | Phases | | 1 | Maximum Current
200 (100) VAC | A | 4
(7) | | Temperature | Deg C | 0 - 45 | | Approx. Weight | Kg | 17 | |
Specifications: | | Flange | Inlet | VG 150 | Outlet
| NW 25 | Pumping Speed
| N2 (L/S) | 460 | | Maximum Compression Ratio | N2 | > 109 | | H2 | 5 x 103 | | Ultimate Pressure | Torr | < 7.5 x 10-9 | Allowable Outlet Pressure
| Pa (Torr) | 400 (3) | | Revolution Speed | RPM | 45,000 | Run-Up Time | Minutes | 7 | | Installation Position | | Any | | Vibration Level | um 0-p | < 0.01 | | Pump Bake Out Temperature | Deg C | max 100 | | Bearing System | | 5-axis magnetic bearing | | Cooling System | | water | | Cooling Water Flow Rate | L / min | > 2 | | N2 Gas Throughput for Purging | Pa-L/Sec
(sccm) | 85
(50) | | Weight | kg | 16 | | Controller Model | 456W-TF | | Input Voltage | VAC | 100-240 | | Frequency | Hz | 50/60 | | Phases | | 1 | Maximum Current
200 (100) VAC | A | 4
(7) | | Temperature | Deg C | 0 - 45 | | Approx. Weight | Kg | 10 | |
Specifications: | | Flange | Inlet | VG 150 | Outlet
| NW 40 | Pumping Speed
| N2 (L/S) | 460 | | Maximum Compression Ratio | N2 | > 108 | | H2 | 1 x 104 | | Ultimate Pressure | Torr | < 7.5 x 10-9 | Allowable Outlet Pressure
| Pa (Torr) | 400 (3) | | Revolution Speed | RPM | 35,000 | Run-Up Time | Minutes | 8 | | Installation Position | | Any | | Vibration Level | um 0-p | < 0.01 | | Pump Bake Out Temperature | Deg C | max 100 | | Bearing System | | 5-axis magnetic bearing | | Cooling System | | water | | Cooling Water Flow Rate | L / min | > 2 | | N2 Gas Throughput for Purging | Pa-L/Sec
(sccm) | 169
(100) | | Weight | kg | 35 | | Controller Model | 606W-TF | | Input Voltage | VAC | 200-240 | | Frequency | Hz | 50/60 | | Phases | | 1 | Maximum Current
200 (100) VAC | A | 7 | | Temperature | Deg C | 0 - 45 | | Approx. Weight | Kg | 13 | |
Specifications: | | Flange | Inlet | VG 200 | Outlet
| NW 40 | Pumping Speed
| N2 (L/S) | 1,300 | | Maximum Compression Ratio | N2 | > 108 | | H2 | 2 x 103 | | Ultimate Pressure | Torr | < 7.5 x 10-9 | Allowable Outlet Pressure
| Pa (Torr) | 266 (32) | | Revolution Speed | RPM | 32,000 | Run-Up Time | Minutes | 9 | | Installation Position | | Any | | Vibration Level | um 0-p | < 0.01 | | Pump Bake Out Temperature | Deg C | max 100 | | Bearing System | | 5-axis magnetic bearing | | Cooling System | | water | | Cooling Water Flow Rate | L / min | > 2 | | N2 Gas Throughput for Purging | Pa-L/Sec
(sccm) | 169
(100) | | Weight | kg | 40 | | Controller Model | 1306W-TF | | Input Voltage | VAC | 200-240 | | Frequency | Hz | 50/60 | | Phases | | 1 | Maximum Current
200 (100) VAC | A | 7 | | Temperature | Deg C | 0 - 45 | | Approx. Weight | Kg | 10 | |
Specifications: | | Flange | Inlet | VG 250 | Outlet
| NW 25 | Pumping Speed
| N2 (L/S) | 1,600 | | Maximum Compression Ratio | N2 | > 109 | | H2 | 8 x 104 | | Ultimate Pressure | Torr | < 7.5 x 10-9 | Allowable Outlet Pressure
| Pa (Torr) | 400 (3) | | Revolution Speed | RPM | 30,000 | Run-Up Time | Minutes | 8 | | Installation Position | | Any | | Vibration Level | um 0-p | < 0.01 | | Pump Bake Out Temperature | Deg C | max 100 | | Bearing System | | 5-axis magnetic bearing | | Cooling System | | water | | Cooling Water Flow Rate | L / min | > 2 | | N2 Gas Throughput for Purging | Pa-L/Sec
(sccm) | 169
(100) | | Weight | kg | 55 | | Controller Model | 1606W-TF | | Input Voltage | VAC | 200-240 | | Frequency | Hz | 50/60 | | Phases | | 1 | Maximum Current
200 (100) VAC | A | 8 | | Temperature | Deg C | 0 - 45 | | Approx. Weight | Kg | 13 | |
Specifications: | | Flange | Inlet | VG 300 | Outlet
| NW 25 | Pumping Speed
| N2 (L/S) | 2,500 | | Maximum Compression Ratio | N2 | > 108 | | H2 | 2 x 104 | | Ultimate Pressure | Torr | < 7.5 x 10-9 | Allowable Outlet Pressure
| Pa (Torr) | 266 (2) | | Revolution Speed | RPM | 27,000 | Run-Up Time | Minutes | 8 | | Installation Position | | Any | | Vibration Level | um 0-p | < 0.01 | | Pump Bake Out Temperature | Deg C | max 100 | | Bearing System | | 5-axis magnetic bearing | | Cooling System | | water | | Cooling Water Flow Rate | L / min | > 2 | | N2 Gas Throughput for Purging | Pa-L/Sec
(sccm) | 169
(100) | | Weight | kg | 80 | | Controller Model | 2506W-TF | | Input Voltage | VAC | 200-240 | | Frequency | Hz | 50/60 | | Phases | | 1 | Maximum Current
200 (100) VAC | A | 8 | | Temperature | Deg C | 0 - 45 | | Approx. Weight | Kg | 17 | |
Specifications: | | Flange | Inlet | VG 350 | Outlet
| NW 40 | Pumping Speed
| N2 (L/S) | 3,300 | | Maximum Compression Ratio | N2 | > 109 | | H2 | 3 x 104 | | Ultimate Pressure | Torr | < 7.5 x 10-9 | Allowable Outlet Pressure
| Pa (Torr) | 400 (3) | | Revolution Speed | RPM | 24,000 | Run-Up Time | Minutes | 9 | | Installation Position | | Any | | Vibration Level | um 0-p | < 0.01 | | Pump Bake Out Temperature | Deg C | max 100 | | Bearing System | | 5-axis magnetic bearing | | Cooling System | | water | | Cooling Water Flow Rate | L / min | > 2 | | N2 Gas Throughput for Purging | Pa-L/Sec
(sccm) | 169
(100) | | Weight | kg | 100 | | Controller Model | 3306W-TF | | Input Voltage | VAC | 200-240 | | Frequency | Hz | 50/60 | | Phases | | 1 | Maximum Current
200 (100) VAC | A | 10 | | Temperature | Deg C | 0 - 45 | | Approx. Weight | Kg | 17 | |
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