|
EVAC Flange Information
|
|
 Ebara stocks a complete line of EVAC chain clamps and aluminum metal seals for converting elastomer seal KF (KF) and ISO flanges to UHV metal seals. They provide a number of benefits over elastomer seals: reduced outgassing, no permeation, no hydrocarbons, resistance to radiation and short half-life. EVAC seals are used in high-energy physics, other UHV applications and, in some circumstances, cryogenic applications. EVAC seals are reliable in high vibration or temperature cycling environments. EVAC chain clamps and tapered flanges are the standard vacuum flange for many Japanese semiconductor equipment manufacturers. The advantages over using the standard ISO flange are the time and space savings during assembly and the flexibility to form high vacuum or UHV seals.
To install a metal seal on an existing KF flange, simply remove the standard clamp, centering ring and O-ring assembly. Replace them with an aluminum knife edge seal and chain clamp. (See diagram.). Standard ISO claw clamps can be used with EVAC aluminum seals to convert ISO flanges from high vacuum to UHV. Tapered flanges are similar to KF flanges and are available in 80 and 100mm sizes from stock. Chain clamps are used to form either elastomer or metal seals with tapered flanges.
|
|
Applications: | |
|
Specifications: | | SPECIFICATIONS | | Tube OD sizes: 3/4 to 4 inches | Materials
Flange: 304 stainless steel
Seal: Aluminum | | Vacuum range: >= 1 x 10-11 Torr - UHV | | Temperature range: -270°C to 150°C |
|
|
|
KF 63 Flanges: |  Ebara stocks blank and bored KF-63 flanges that are compatible with other manufacturers’ KF-63 flanges made to the ISO 2861 specification. They can be used with EVAC chain clamps to form elastomer or aluminum metal seals. Elastomer seals are formed with ISO-63 centering ring/O-ring assemblies and elastomer EVAC chain clamps. Metal seals are formed with EVAC aluminum seals and metal seal chain clamps. KF-63 flanges are made from 304 stainless steel for 2.5 inch OD tube size.
| MODEL NUMBER | DESCRIPTION | A | B | C | D | E | | KF-63-250 | Bored for 21/2 inch tube OD | 3.43 | 2.44 | 2.76 | 2.51 | 2.71 | | KF-63B | Blank | 3.43 | - | 2.76 | - | - |
|
EVAC Tapered Flanges: |  These flanges are designed specifically for use with EVAC chain clamps for elastomer or aluminum metal seals. High vacuum seals are formed with a standard ISO centering ring/O- ring assembly and an elastomer seal EVAC chain clamp. UHV seals are formed with a metal seal chain clamp and an aluminum seal. Both blank and bored 304 stainless steel versions are available from stock in 80 and 100mm sizes for 3 and 4 inch OD tube sizes, respectively. Flanges for tube sizes up to 28 inches OD or metric tube sizes can be supplied upon request.
| MODEL NUMBER | DESCRIPTION | A | B | C | D | E | | KF-80-300 | Bored for 3 inch tube OD | 3.43 | 2.44 | 2.76 | 2.51 | 2.71 | | KF-80B | Blank | 3.43 | - | 2.76 | - | - | | KF-100-400 | Bored for 4 inch tube OD | 5.28 | 3.87 | 4.02 | 4.01 | 4.61 | | KF-100B | Blank | 5.28 | - | 4.02 | - | - |
|
Description: | | Ebara stocks chain clamps for KF (KF) and EVAC tapered flanges in two styles: one with Teflon coated aluminum links and an uncoated version. The less expensive uncoated version is the preferred choice for sealing standard KF flanges with aluminum metal seals. The uncoated chain clamps can be used with Ebara or other manufacturers’ KF flanges with a radius of approximately .060 of an inch on the outer edge of the non-sealing side. Most manufacturers’ KF flanges have this feature. If the flanges to be sealed have a sharp edge, the Teflon coated chain clamps are required to ensure adequate sealing force for aluminum metal seals. Both versions use a single, hex head nut for closure. Stainless steel chain clamps and low cost composite chain clamps are available for elastomer KF connections. Chain clamps for KF-63 flanges are similar to the KF-16 to 50 sizes. The style to use with KF-63 elastomer seals has a single knob for tightening. The clamp used for sealing aluminum metal seals has a single hex head nut. Both have uncoated aluminum links, although Teflon coated aluminum versions are available. Chain clamps for 80 to 100mm tapered flanges are stocked in two styles: one with a single knob for elastomer seals and another with two allen head bolts for aluminum metal seals. Although chain clamps are bakeable to 150˚C, the knobs should not be baked above 60˚C. Chain clamps for tube sizes up to 28 inch OD can be supplied on request. |
Chain Clamps for KF 16 - 50 Flanges Aluminum Links: |
| MODEL NUMBER | DIAGRAM | APPLICATION | A | B | MAXIMUM
TEMPERATURE | TORQUE (LB. IN.)
ELASTOMER/METAL | | KF-16-CC-AN | A | Metal or Elastomer Seals | 4.53 | 2.36 | 150°C | 9 / 22 | | KF-25-CC-AN | A | Metal or Elastomer Seals | 4.92 | 2.76 | 150°C | 13 / 26 | | KF-40-CC-AN | A | Metal or Elastomer Seals | 5.32 | 3.35 | 150°C | 18 / 39 | | KF-50-CC-AN | A | Metal or Elastomer Seals | 5.98 | 4.13 | 150°C | 22 / 44 |
|
Chain Clamps for KF 16 - 50 Flanges Teflon Coated Links: |
| MODEL NUMBER | DIAGRAM | APPLICATION | A | B | MAXIMUM
TEMPERATURE | TORQUE (LB. IN.)
ELASTOMER/METAL | | NW-16-CC-TN | A | No radius, metal/elastomer | 4.53 | 2.36 | 150°C | 9 / 22 | | NW-25-CC-TN | A | No radius, metal/elastomer | 4.92 | 2.76 | 150°C | 13 / 26 | | NW-40-CC-TN | A | No radius, metal/elastomer | 5.32 | 3.35 | 150°C | 18 / 39 | | NW-50-CC-TN | A | No radius, metal/elastomer | 5.98 | 4.13 | 150°C | 22 / 44 |
|
Chain Clamps for KF 63 Flanges: |
| MODEL NUMBER | DIAGRAM | APPLICATION | A | B | MAXIMUM
TEMPERATURE | TORQUE (LB. IN.)
ELASTOMER/METAL | | KF-63-CCV-AN | B | Elastomer seals only | 6.69 | 4.72 | 100°C | - | | KF-63-CC-AN | A | Metal or elastomer seals | 6.30 | 4.72 | 150°C | 22 / 44 |
|
Chain Clamps for 80 - 100 mm Tapered Flanges: |
| MODEL NUMBER | DIAGRAM | APPLICATION | A | B | MAXIMUM
TEMPERATURE | TORQUE
(LB. IN.) | | KF-80-CCV-AS | D | Elastomer seals only | 9.61 | 6.06 | 150°C | - | | KF-80-CC-TS | C | Metal seals only | - | 6.30 | 150°C | 75 | | KF-100-CCV-AS | D | Elastomer seals only | 10.08 | 6.77 | 150°C | - | | KF-100-CC-TS | C | Metal seals only | - | 7.09 | 150°C | 88 |
|
Diagrams: | |
|
