Our experience coupled with a broad product offering allows us to integrate components, providing comprehensive solutions to semiconductor fabs and equipment manufacturers To Improve overall system performance and achieve customer defined goals, a thorough evaluation of the system is conducted. A cost of ownership model can show payback as a result of increased tool utilization and decreased planned and unplanned maintenance costs.

Foreline traps, thermal products, valves and weldments can be provided as turnkey modules. Thermal and vacuum characterization can be performed at Ebara before the assembly is supplied, leak checked, blanked off and clean room packaged.