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EBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems.
Pump lines and gas lines have unique thermal challenges due to many factors, including poor conductivity of stainless steel, differing thermal masses of plumbing components, and ambient temperature changes between the cleanroom and subfab.
Ebara heater products provide uniform heat flux to prevent condensation in gas delivery lines and clogging in pump lines.
EBARA provides “turn-key” service from system survey and measurement to heater and controller installation and test.
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Product Features: | | Part Number | TUBE O.D (in.) | LENGTH "L" (in.) | WATTS | | W020050210 | 1.5 | 2 | 15 | | W020050217 | 1.5 | 2* | 8 | | W030050197 | 1.5 | 3 | 22 | | W030050198 | 1.5 | 3* | 15 | | W040050150 | 1.5 | 4 | 29 | | W040040151 | 1.5 | 4* | 22 | | W050050167 | 1.5 | 5 | 36 | | W050050168 | 1.5 | 5* | 29 | | W050060157 | 1.5 | 6 | 43 | | W050090504 | 1.5 | 9* | 57 | | W050100518 | 1.5 | 10* | 64 | | W050120108 | 1.5 | 12 | 85 | | W050120512 | 1.5 | 12* | 77 | | W05018086 | 1.5 | 18 | 128 | | W050180503 | 1.5 | 18* | 121 | | W05024093 | 1.5 | 24 | 170 | | W050240504 | 1.5 | 24* | 163 | | W050300501 | 1.5 | 30 | 213 | | W05030099 | 1.5 | 30* | 206 | | W050360504 | 1.5 | 36 | 255 | | W02006692 | 2 | 2 | 19 | | W02006696 | 2 | 2* | 10 | | W03006692 | 2 | 3 | 29 | | W03006693 | 2 | 3* | 19 | | W04006687 | 2 | 4 | 38 | | W04006688 | 2 | 4* | 29 | | W05006683 | 2 | 5 | 48 | | W05006684 | 2 | 5* | 38 | | W06006692 | 2 | 6 | 57 | | W06006691 | 2 | 6* | 47 | | WL02080T | 2 | 8* | 67 | | WL02090T | 2 | 9* | 78 | | W066100501 | 2 | 10 | 95 | | WL02100T | 2 | 10* | 86 | | W06612087 | 2 | 12 | 114 | | W06612089 | 2 | 12* | 104 | | WL020160T | 2 | 16* | 150 | | W06618081 | 2 | 18 | 170 | | W066180504 | 2 | 18* | 160 | | W06624088 | 2 | 24 | 227 | | W06624089 | 2 | 24* | 217 | | W06630081 | 2 | 30 | 283 | | W06630082 | 2 | 30* | 273 | | W06636088 | 2 | 36 | 340 | | W02009687 | 3 | 2 | 24 | | W02009688 | 3 | 2* | 12 | | W03009691 | 3 | 3 | 36 | | W03009692 | 3 | 3* | 24 | | W04009682 | 3 | 4 | 48 | | W04009683 | 3 | 4* | 36 | | W05009683 | 3 | 5 | 59 | | W05009684 | 3 | 5* | 48 | | W06009689 | 3 | 6 | 71 | | W09612082 | 3 | 12 | 142 | | W09618099 | 3 | 18 | 213 | | W09624083 | 3 | 24 | 283 | | W09630099 | 3 | 30 | 354 | | W09636085 | 3 | 36 | 425 | | W02012888 | 4 | 2 | 32 | | W02012889 | 4 | 2* | 16 | | W03012887 | 4 | 3 | 48 | | W03012888 | 4 | 3* | 32 | | W04012882 | 4 | 4 | 63 | | W04012883 | 4 | 4* | 48 | | W05012881 | 4 | 5 | 79 | | W05012882 | 4 | 5* | 63 | | W06012886 | 4 | 6 | 95 | | W60128509 | 4 | 6* | 79 | | WL04080T | 4 | 8* | 132 | | W090128508 | 4 | 9* | 151 | | W100128508 | 4 | 10* | 170 | | WL04110T | 4 | 11* | 195 | | W12012891 | 4 | 12 | 189 | | W12012896 | 4 | 12* | 173 | | W128150502 | 4 | 15* | 264 | | W12018081 | 4 | 18 | 283 | | W12824085 | 4 | 24 | 377 | | W128260503 | 4 | 26* | 471 | | W12830082 | 4 | 30 | 472 | | W12830081 | 4 | 30* | 456 | | W12836086 | 4 | 36 | 566 |
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* Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note: We offer heaters in both 120 and 208V |
Product Features: | 90º Elbow Heaters, without Tangent | PN | Tube O.D. (in.) | Length "L" (in.) | Radius "R" (in.) | OA (in.) | IA (in.) | Watts | | W04205089 | 1.5 | 2.00 | 2.25 | 4.21 | 1.85 | 26 | | W05706692 | 2 | 2.75 | 3.00 | 5.78 | 2.64 | 45 | | W08909787 | 3 | 4.00 | 4.50 | 8.42 | 3.71 | 84 | | W12012894 | 4 | 5.50 | 6.00 | 11.56 | 5.28 | 149 |
45º Elbow Heaters, with Tangent
| PN | Tube O.D. (in.) | Length "L" (in.) | Radius "R" (in.) | OA (in.) | IA (in.) | Watts | | W03205088 | 1.5 | 1.38 | 2.25 | 3.23 | 2.04 | 23 | | W04706691 | 2 | 2.06 | 3.00 | 4.77 | 3.20 | 44 | | W07809782 | 3 | 3.18 | 4.50 | 7.33 | 4.97 | 85 | | W10412882 | 4 | 4.31 | 6.00 | 9.90 | 6.76 | 148 |
45º Elbow Heaters, without Tangent
| PN | Tube O.D. (in.) | Length "L" (in.) | Radius "R" (in.) | OA (in.) | IA (in.) | Watts | | W01805089 | 1.5 | 0.69 | 2.25 | 1.85 | 0.67 | 14 | | W02606687 | 2 | 1.00 | 3.00 | 2.64 | 1.07 | 23 | | W04209783 | 3 | 1.37 | 4.50 | 3.71 | 1.35 | 43 | | W05712885 | 4 | 2.00 | 6.00 | 5.28 | 2.14 | 75 | |  | * Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note: We offer heaters in both 120 and 208V
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Product Features: | | PN | TUBE O.D (in.) | LENGTH "L" (in.) | WATTS | | W04706490 | 1.5 | 2 | 38 | | W06208192 | 2 | 2.75 | 69 | | W09512084 | 3 | 3 | 89 | | W12515583 | 4 | 3.63 | 140 | |  | |
Product Features: | | PN | TUBE OD (in.) | Nominal Pipe OD (in.) | WATTS | | W035040109 | KF-40 | 1.5 | 10 | | W04505098 | KF-50 | 2 | 15 | | W02017686 | ISO-80 | 3 | 70 | | W02020488 | ISO-100 | 4 | 82 |
* Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note: We offer heaters in both 120 and 208V |
Product Features: | | PN | LENGTH "L" (in.) | TUBE ID1 (in.) | TUBE ID2 (in.) | WATTS | | W020062100 | 1.38 | 2 | 1.5 | 12 | | W03409082 | 2.42 | 3 | 2 | 24 | | W04410383 | 2.63 | 4 | 2 | 31 | | W03014982 | 2.6 | 4 | 3 | 36 | |  |
* Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note: We offer heaters in both 120 and 208V |
Product Features: | | Description | PN without T/C | PN with T/C Type J | Watts | | 3/4 x 6" | W024060C1 | W024060C1A | 36 | | 3/4 x 9" | W024090C1 | W024090C1A | 54 | | 3/4 x 12" | W024120C1 | W024120C1A | 71 | | 3/4 x 18" | W024180C1 | W024180C1A | 107 | | 3/4 x 24" | W024240C1 | W024240C1A | 142 | | 3/4 x 36" | W024360C1 | W024360C1A | 213 | | 3/4" Insulator, 18" L | W024180C0 | x | 0 | | 3/4" Insulator, 36" L | W02436084 | x | 0 | | 3/4" ELBOW | W024020C0 | x | 0 | | 3/4" "T" | W024030C0 | x | 0 |
0.25"
| Description | PN without T/C | PN with T/C Type J | Watts | | 1/4 x 6" | W008060C1 | W008060C1A | 12 | | 1/4 x 9" | W008090C1 | W008090C1A | 18 | | 1/4 x 12" | W008120C1 | W008120C1A | 24 | | 1/4 x 18" | W008180C1 | W008180C1A | 36 | | 1/4 x 24" | W008240C1 | W008240C1A | 48 | | 1/4 x 36" | W008360C1 | W008360C1A | 72 | | Male VCR Valve heater [3" L] | W03104786 | - | 18 | | Female VCR Valve heater [4.75" L] | W04704893 | - | 28 | | 1/4" VCR Union heater [7/8" ID x 1 3/4" L] | W01702783 | W01702783A | 10 | | 1/4" VCR Union insulator [3/4" ID x 1 1/2" L] | W02401580 | - | 0 | | 1/4" Insulator, 18" L | 008180C0 | - | 0 | | 1/4" 90 DEG ELBOW | 008020C0 | - | 0 | | 1/4" "T" | 008030C0 | - | 0 |
0.375"
| Description | PN without T/C | PN with T/C Type J | Watts | | 3/8 x 6" | W012060C1 | W012060C1A | 18 | | 3/8 x 9" | W012090C1 | W012090C1A | 27 | | 3/8 x 12" | W012120C1 | W012120C1A | 36 | | 3/8 x 18" | W012180C1 | W012180C1A | 54 | | 3/8 x 24" | W012240C1 | W012240C1A | 72 | | 3/8 x 36" | W012360C1 | W012360C1A | 108 | | 3/8" Insulator, 18" L | W012180C0 | x | 0 | | 3/8" 90 DEG ELBOW | W012020C0 | x | 0 | | 3/8" "T" | W012030C0 | x | 0 |
0.5"
| Description | PN without T/C | PN with T/C Type J | Watts | | 1/2 x 6" | W016060C1 | W016060C1A | 24 | | 1/2 x 9" | W016090C1 | W016090C1A | 36 | | 1/2 x 12" | W016120C1 | W016120C1A | 48 | | 1/2 x 18" | W016180C1 | W016180C1A | 72 | | 1/2 x 24" | W016240C1 | W016240C1A | 96 | | 1/2 x 36" | W016360C1 | W016360C1A | 144 | | Male VCR Valve heater [3.75" L] | W03804782 | x | 27 | | Female VCR Valve heater [6.51" L] | W04706690 | x | 47 | | 1/2" VCR Union heater [1 1/4" ID x 1 1/2" L] | W03901581 | W04706690 | 12 | | 1/2" VCR Union insulator [1 1/4" ID x 1 1/2" L] | W03901580 | x | 0 | | 1/2" Insulator, 18" L | W016180C0 | x | 0 | | 1/2" ELBOW | W016020C0 | x | 0 | | 1/2" "T" | W016030C0 | x | 0 |
0.625"
| Description | PN without T/C | PN with T/C Type J | Watts | | 5/8 x 6" | WL021060500U | x | 36 | | 5/8 x 9" | WL021090500U | x | 54 | | 5/8 x 12" | WL021120500U | x | 71 | | 5/8 x 18" | WL021180500U | x | 107 | | 5/8 x 24" | WL021240500U | x | 142 | | 5/8 x 36" | WL021360500U | x | 213 | | 5/8" Insulator, 18" L | WL021180501U | x | 0 | | 5/8" 45 DEG. ELBOW INSULATOR | WL021031500U | x | 0 | | 5/8" 90 DEG. ELBOW INSULATOR | WL021047500U | x | 0 |
0.75"
| Description | PN without T/C | PN with T/C Type J | Watts | | 3/4 x 6" | W024060C1 | W024060C1A | 36 | | 3/4 x 9" | W024090C1 | W024090C1A | 54 | | 3/4 x 12" | W024120C1 | W024120C1A | 71 | | 3/4 x 18" | W024180C1 | W024180C1A | 107 | | 3/4 x 24" | W024240C1 | W024240C1A | 142 | | 3/4 x 36" | W024360C1 | W024360C1A | 213 | | 3/4" Insulator, 18" L | W024180C0 | x | 0 | | 3/4" Insulator, 36" L | W'02436084 | x | 0 | | 3/4" ELBOW | W024020C0 | x | 0 | | 3/4" "T" | W024030C0 | x | 0 |
* Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note: We offer heaters in both 120 and 208V |
Product Features: | | PN | TUBE O.D (in.) | LENGTH "L" (in.) | WATTS | | W03005685 | 1.5 | 3.00 | 26 | | | 1.5 | 3* | 18 | | W05606085 | 1.5 | 6 | 51 | | | 1.5 | 6* | 44 | | W03007785 | 2 | 3 | 34 | | | 2 | 3* | 24 | | W060077106 | 2 | 6 | 68 | | | 2 | 6* | 59 | | W03011787 | 3 | 3 | 44 | | | 3 | 3* | 30 | | W06011790 | 3 | 6 | 88 | | | 3 | 6* | 74 | | W11712082 | 3 | 12 | 175 | | W050149501 | | 5* | 90 | | W06014982 | 4 | 6 | 111 | | | 4 | 6* | 94 | | W12014983 | 4 | 12 | 222 | |  |
* Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note: We offer heaters in both 120 and 208V |
Product Features: | | Call for more information. |
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