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ISO Flanges, Fittings and Hardware

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Ebara ISO flanges and hardware are manufactured to the International Standards Organization specification so they can be mated to other manufacturers' ISO flanges. ISO flanges are made from Argon Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur in order to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112.

Maximum inclusion size is 2.5 per ASTM E-45. Normally our standard material is in the low carbon range for 304 stainless steel. For increased corrosion resistance, some sizes are available from stock in 316L stainless steel.

Optional fastener and nonrotatable ISO flanges are available from stock for 2-1/2 to 20 inch tube sizes. Both use a Viton O-ring, held in place by a centering ring, to effect a seal with a vacuum range of 10-8 Torr. ISO components can be baked to 204ºC.

ISO flanges can also be used with standard clamps and aluminum seals to obtain a UHV seal bakeable to 150ºC.

Applications:

Specifications:
SPECIFICATIONS
General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 




ISO Clamp Style Flanges:
MODEL NUMBERDIAGRAMNOMINAL
ID
ABCDE
ISO-63-000-OFA-3.7400.47---
ISO-63-250-OFB21/23.7400.472.4382.5100.250
ISO-80-000-OFA-4.3310.47---
ISO-80-300-OFB34.3310.472.9383.0100.250
ISO-100-000-OFA-5.1180.47---
ISO-100-400-OFB45.1180.473.9104.0100.250
ISO-160-000-OFA-7.0870.47---
ISO-160-600-OFB67.0870.475.8756.0200.375
ISO-200-000-OFA-9.4490.47---
ISO-200-800-OFB89.4490.477.8758.0200.375
ISO-250-000-OFA-11.4170.47---
ISO-250-1000-OFB1011.4170.479.87510.0200.375
ISO-320-000-OFA-14.5670.67---
ISO-320-1200-OFB1214.5670.6711.87512.0200.375
ISO-320-1275-OFB1214.5670.6712.42012.7700.375
ISO-400-000-OFA-17.7160.67---
ISO-400-1600-OFB1617.7160.6715.62416.0200.375
ISO-500-000-OFA-21.6530.67---
ISO-500-2000-OFB2021.6530.6719.62420.0200.3

ISO 316L Clamp Style Flanges:

ISO Rotatable Bolt Ring and Retainer Ring:

ISO Non Rotatable Flanges:


ISO Bolt Kits:
MODEL NUMBERDESCRIPTION
B-ISO-63(4) SS bolts, nuts & washers, M8 x 40mm
B-ISO-80(8) SS bolts, nuts & washers, M8 x 40mm
B-ISO-100(8) SS bolts, nuts & washers, M8 x 40mm
B-ISO-160(8) SS bolts, nuts & washers, M10 x 50mm
B-ISO-200(12) SS bolts, nuts & washers, M10 x 50mm
B-ISO-250(12) SS bolts, nuts & washers, M10 x 50mm
B-ISO-320(12) SS bolts, nuts & washers, M12 x 60mm
B-ISO-400(16) SS bolts, nuts & washers, M12 x 60mm
B-ISO-500(16) SS bolts, nuts & washers, M12 x 60mm

ISO Double Claw Aluminum Clamp:

ISO Single Claw Aluminum Clamp:

ISO Single Claw Aluminum Clamp - Metric:


ISO Aluminum Centering Ring with O-ring and Aluminum Spacer Ring:
MODEL NUMBERDIAGRAMO-RING
MATERIAL
AB
ISO-63-CR-AV*AViton2.632.74
ISO-63-CR-AB*ABuna2.632.74
ISO-80-CR-AVAViton3.143.25
ISO-80-CR-ABABuna3.143.25
ISO-100-CR-AVAViton3.894.00
ISO-100-CR-ABABuna3.894.00
ISO-160-CR-AVAViton5.906.01
ISO-160-CR-ABABuna5.906.01
ISO-200-CR-AVAViton8.268.37
ISO-200-CR-ABABuna8.268.37
ISO-250-CR-AVAViton10.1410.25
ISO-250-CR-ABABuna10.1410.25
ISO-320-CR-AVBViton12.3212.51
ISO-320-CR-ABBBuna12.3212.51
ISO-400-CR-AVBViton15.5515.75
ISO-400-CR-ABBBuna15.5515.75
ISO-500-CR-AVBViton19.5319.72
ISO-500-CR-ABBBuna19.5319.72

ISO Stainless Steel Centering Ring with O-ring and Aluminum Spacer Ring:

ISO 316L Stainless Steel Centering Ring with O-ring and Aluminum Spacer Ring:

ISO Stainless Steel Centering Ring with O-ring:

ISO Screened Stainless Steel Centering Ring with O-ring and Aluminum Spacer Ring:


Description:
Ebara manufactures a complete line of ISO vacuum fittings with optional fastener or nonrotatable flanges. The tube portions are fabricated from 304 stainless steel. For increased resistance to corrosion in downstream semiconductor processes, some ISO flanges and fittings are available in 316L stainless steel. Ebara makes its own elbows, and all tees and crosses are made with the pulled-port technique. This allows smooth, crevice-free butt welds to provide the maximum in cleanliness for UHV applications. Fittings are shown with OF flanges only. To order a fitting with nonrotatable flanges substitute “-N” for “-OF ” in the model number. Fittings are also available with CF (Conflat style), KF (ISO-KF compatible) and ASA flanges. Standard finish is bead blasted. Electropolished finish also available.

ISO Half Nipple:
MODEL NUMBERTUBE
OD
A
1N-ISO-63-OF21/23.25
1N-ISO-63-OF-V21/24.00
1N-ISO-63-OF-H21/23.94
1N-ISO-80-OF33.50
1N-ISO-80-OF-H33.94
1N-ISO-100-OF44.13
1N-ISO-100-OF-V45.12
1N-ISO-100-OF-H43.94
1N-ISO-160-OF65.38
1N-ISO-160-OF-V66.44
1N-ISO-160-OF-H63.94
1N-ISO-200-OF87.38
1N-ISO-250-OF109.88
1N-ISO-320-OF129.88
1N-ISO-400-OF169.88
1N-ISO-500-OF209.88

ISO 316L Half Nipple:

ISO Full Nipple:

ISO Reducer Nipple:

ISO Conical Reducer Nipple:

ISO 45° Radius Elbow with Tangents:

ISO 90° Radius Elbow:

ISO 90° Mitered Elbow:

ISO Tee:

ISO Reducer Tee:

ISO 4-Way Cross:

ISO 4-Way Reducer Cross:

ISO 5-Way Cross:

ISO 6-Way Cross:


Description:
NOTE: Other O-Ring Materials Available upon request

Viton O-ring:
MODEL NUMBERFLANGE
TYPE
ISO-63-0R-VISO-63
ISO-80-OR-VISO-80
ISO-100-OR-VISO-100
ISO-160-OR-VISO-160
ISO-200-OR-VISO-200
ISO-250-OR-VISO-250
ISO-320-OR-VISO-320
ISO-400-OR-VISO-400
ISO-500-OR-VISO-500

Buna O-ring:


Assembly Instructions:
Optional fastener flanges are joined around the periphery with clamps. Double claw clamps are used when a pair of OF flanges are joined (See diagram A.), or single claw clamps are used to join an OF flange to a tapped nonrotatable on a pump or gate valve. (See diagram B.) This fastening method allows the OF flange to be rotated for ease of component alignment. Additionally, a rotatable bolt ring can be used to fasten an OF flange to a nonrotatable flange using bolts. (See diagram C.) A retainer ring prevents the OF flange from slipping through the bolt ring. Nonrotatable ISO flanges are assembled with bolts. (See diagram D.) They do not allow rotation of bolt holes on mating flanges to align components.


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