Turbo Pump Dry Pump
 

Liquid Nitrogen Traps

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Ebara's liquid nitrogen traps remove condensible gasses before they enter the mechanical pump and contaminate the oil. They also prevent mechanical pump oil vapors from contaminating the vacuum chamber. These traps actually act as a pump producing lower base pressures and faster pump down. Dual-tube traps can be attached to an automatic fill device, eliminating the necessity of manually refilling the reservoir with liquid nitrogen.

The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned without disassembling the system. For proper sealing, apply a light coating of Krytox lube when cleaning or replacing the O-ring. Coaxial port configurations, ISO, CF, EVAC or ASA flanges, electropolish finish and drain fittings are available.

Applications:





Specifications:
SPECIFICATIONS
Material
   Trap Body: 304 stainless steel
   Flanges: 304 stainless steel
Vacuum range: >= 1 x 10-8 Torr
Temperature range: -20°C to 150°C
Options: ISO body flanges

Refill Time Table for Single Tube LN2 Traps
TRAP
DIAMETER
HOURS
4 inch5
6 inch8
8 inch12

Models:

Drawings:


Specifications:
SPECIFICATIONS
Material
   Trap Body: 304 stainless steel
   Flanges: 304 stainless steel
Vacuum range: >= 1 x 10-8 Torr
Temperature range: -20°C to 150°C
Options: ISO body flanges

Models:

Drawings:


Specifications:
SPECIFICATIONS
Material
   Trap Body: 304 stainless steel
   Flanges: 304 stainless steel
Vacuum range: >= 1 x 10-8 Torr
Temperature range: -20°C to 150°C
Options: ISO body flanges

Models:

Drawings:


Specifications:
SPECIFICATIONS
Material
   Trap Body: 304 stainless steel
   Flanges: 304 stainless steel
Vacuum range: >= 1 x 10-8 Torr
Temperature range: -20°C to 150°C
Options: ISO body flanges

Models:

Drawings:

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