Ultra-High Concentration Clean Ozonizer - OZC Series
The ozonizer operates on the corona discharge principal (passing oxygen through an electric fi eld of high potential) and employs a high performance trench discharger that differs from conventional ozone generator methods. The trench discharger is designed to have more surface area and is cooled by city water, creatinglarge concentrations of ozone per unit discharge area.
Ozonized Water Generator - OZW Series
The EBARA Ozonized water generator is capable of continuously feeding clean Ozonized water to meet therequirements of next-generation wet processes through the use of the high concentration ozone generator, OZC Series, a Teflon® hollow fi ber membrane and the particle-free pump.
Steadily produces large volumes of ozone at ultra high concentrations
Achieves ultra clean ozone through the implementation of ceramic-coated electrodes and a sapphire dielectric.
Reduced footprint due to high volumes of ozone produced per unit of discharge area.
Equipped with ozone leak detector as standard equipment.
S2-93 compliant design. CE model availalble.
Basic Operation: Oxygen is passed through the trench discharger (an electric fi eld) thus ionizing the oxygen molecules to react and produce ozone gas. The customer then can take the ozone gas and uses per their application.
Model Performance Summary:
MODEL
RAW GAS FLOW RATE (SLM)
OZONE CONCENTRATION (VOL.%)
OZONE CONCENTRATION (G/M3)
GAS PRESSURE AT DISCHARGE CELL KPA (PSI)
OZC-1
2.5
9.3
200
150 (21.7)
OZC-4
10
9.3
200
150 (21.7)
OZC-10
25
9.3
200
150 (21.7)
OZC-16
40
9.3
200
150 (21.7)
OZC-20
50
9.3
200
150 (21.7)
Applications:
SACVD – TEOS based SiO2 deposition
Dry photoresist ashing
Sputtering
Dry and wet cleaning
Surface oxidation
Annealing of oxide layers
Ultrapure water disinfecting
Product Features:
High concentration, large volume of Ozonized water supply
Systems are capable of providing Ozonized water concentration between 3-30 mg/L at fl ows of 3-50 L/min, (variable to suit operating conditions).
Impurity free Ozonized water
Use of the OZC Series, a Teflon® hollow fiber membrane and the particle-free pump assist in the elimination of TOC and heavy metal impurities.
Superior concentration and flow rate stability
The use of an UV absorption ozone monitor and the variable speed particle free pump allows for accurately controlled ozone gas concentration and constant fl ow of the Ozonized water supply.
Superior ease and safe operation ideally suited for production
Touch-screen operation panel.
External control signals allow for local or remote control.
S2-93 compliant design. CE model availalble.
Basic operation of OZW units:
Ultra pure water is pumped through the hollow fi ber membrane by the EBARA non-particle pump at the same time ozone gas produced by the internal OZC unit is also introduced to the hollow fiber membrane, thus producing high concentration stable Ozonized water.