Turbo Pump Dry Pump
 

PDV Series Dry Vacuum Pumps

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EBARA's Portable Dry Vacuum (PDV) Series Dry Vacuum Pumps provides for a clean, reliable vacuum for today's high tech manufacturing, semiconductor, thin film, photovoltaic, biomedical and pharmaceutical industries. The PDV Series Dry Vacuum Pumps offers a low cost, oil free energy efficient solution for replacing scroll and oil pumps for clean applications. The PDV Series Dry Vacuum Pumps require no annual maintenance and offers a low cost of ownership and higher return on investment (ROI). The serial communication allows both remote monitoring and control to the PDV Series Dry Vacuum Pumps.

Features & Benefits:
  • Small Light Weight Package
  • Portable Dry Vacuum Pump
  • Long Maintenance Intervals
  • Built in Exhaust Check Valve
  • Air Cooled
  • Oil Free
  • Non Contacting Seal
  • Low Noise
  • Energy Savings
PDV Series Dry Vacuum Pumps
Applications:





Specifications:
Max Pumping Speed CFM8
L/min230
Ultimate PressuremTorr3.0
Pa0.5
FlangeInletNW25
OutletNW25
SizeW x L x H (in)6.6 x 17.4 x 10.7
W x L x H (mm)168 x 442 x 273
Power SupplyVolts100-240V
Cooling System Air Cooling
Weightlb33
kg15
NoisedB(A)<58

Performance:

Drawings:


Specifications:
Max Pumping Speed CFM7
L/min200*
Ultimate PressuremTorr15.0*
Pa2.0*
FlangeInletNW25
OutletNW25
SizeW x L x H (in)6.6 x 17.4 x 10.7
W x L x H (mm)168 x 442 x 273
Power SupplyVolts100-240V
Cooling System Air Cooling
Gas BallastFittingRC 1/8
Flow (SLM)4.9
TypeDry Air or N2
Weightlb33
kg15
NoisedB(A)<58

Performance:

Drawings:


Specifications:
Max Pumping Speed CFM18
L/min500
Ultimate PressuremTorr3.0
Pa0.5
FlangeInletNW40
OutletNW25
SizeW x L x H (in)7.2 x 18.4 x 12.0
W x L x H (mm)185 x 467 x 305
Power SupplyVolts100-240V
Cooling System Air Cooling
Weightlb44
kg20
NoisedB(A)<58

Performance:

Drawings:


Specifications:
Max Pumping Speed CFM15
L/min430*
Ultimate PressuremTorr15.0*
Pa2.0*
FlangeInletNW40
OutletNW25
SizeW x L x H (in)7.2 x 18.4 x 12.0
W x L x H (mm)185 x 467 x 305
Power SupplyVolts100-240V
Cooling System Air Cooling
Gas BallastFittingRC 1/8
Flow (SLM)4.9
TypeDry Air or N2
Weightlb44
kg20
NoisedB(A)<58

Performance:

Drawings:

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