Exhaust abatement solution for Semiconductor, PV-Solar, Compound Semiconductor and R&D
EBARA Technologies Inc. offers a full line of comprehensive Point-of-Use Abatement (POU) systems for the exhaust treatment of the effluent gases used in the manufacturing of semiconductor chips, photovoltaic cells and flat panel displays. EBARA offers our customers the optimum effluent gas treatment based on our own engineered products, strategic alliances, license agreements and OEM distributed products. Our POU abatement product line includes wet scrubbers, combustion-wash, catalytic, dynamic oxidation and thermal technologies. All of Ebara's abatement technologies are designed for low cost of ownership, high reliability and strict compliance to safety standards.
Our experience as one of the leading suppliers of POU abatement to the microelectronics and related industries, we understand there is no perfect solution for exhaust gas treatment. The TRIC to selecting the proper solution is first understanding the gases used are Toxic, Reactive, Ignitable or Corrosive. The processing of semiconductor devices varies from solar cells even though they may use the similar gases. Each process poses it on unique challenges. Each company has its own safety policies and local regulations to adhere to. Our experienced staff works hard to ensure our customer's exhaust management objectives are meet and exceeded. From safe gas handling to meeting the toughest environmental challenges such as reducing greenhouse emissions, EBARA partners with you to offer the optimum POU abatement solution.
PECVD
LPCVD
Etch
PFCs
MOCVD
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Epitaxial
Metal Etch
LPCVD
Poly Etch
Water Reactive
CiGS
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Pyrophorics
High Flow Silane
LPCVD
Gas Pad
Particle Handling
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PECVD
LPCVD
Etch
MOCVD
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Dielectric Etch
PFCs
Ashing
Ion Implant
MOCVD
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