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Dry Vacuum Pumps

EBARA is a world leader in the design and manufacture of "dry" mechanical pumps. EBARA dry pumps provide a host of product enhancements including increased reliability, reduced clean room particulate load, low noise, low vibration, lower operating costs, and the lowest cost of ownership.

EBARA's dry pumps survive the harshest applications such as LPCVD, PECVD, CVD, and meta etch. EBARA's dry pumps are used for many applications in and outside the semiconductor industry where oil backstreaming is unacceptable. Custom designs and broad product lines make an EBARA dry pump the pump of choice. EBARA offers broad product lines with many models to choose from.

PDV Series