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VOS Series Dry Vacuum Pumps

The VOS Series has the highest pumping speed to footprint ratio in the industry. The VOS is a multistage lobe pump designed for installation on or very close to the process tool for clean and light duty applications such as Load Lock and SEM.

VOS series pumps are lighter, more compact and pumpdown faster than most point-of-use pumps on the market today.

Highest pumping speed to footprint ratio in the industry
Unique pumping mechanism for fast pumpdowns
Low Cost of Ownership
No Nitrogen purge required in clean applications
Robust, proven lobe style design
High performance brushless DC motor
Digital and analog signals available for interface to process tools
Stackable installation available
SEMI S2 assessed, NRTL Listed, CE Marked

VOS100

VOS100P

Untitled Document

VOS 100 Series Specifications:

Pumping Speed 50/60 Hz	CFM L/min M3/Hr	64 1800 108
Ultimate Pressure 50/60 Hz	mTorr Pa mBar	9 1.2 0.012
Connection	Gas Inlet	NW 50
Connection	Gas Outlet	NW 25
Power at Ultimate Pressure	KW	0.7
Maximum Power	KW	2.5
Cooling Water Requirements	Min. Flow Rate L/min	1.5
Bearing and Dilution N2	Bearing Seals L/min	0
Cabinet Dimensions LxWxH	inches mm	17.7 x 9.1 x 10.8 450 x 230 x 275
Weight	lbs kg	143 65