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Foreline Traps

Foreline Traps
Ebara provides standard and custom foreline traps for the vacuum industry. We can provide traps to prevent back streaming and remove condensable gases and filter out particles. Ebara has traps designed for particular applications such as LPCVD-TEOS that can extend maintenance intervals.
General Information
General Information
 
Metal Sieve Traps
Metal Sieve Traps
 
Molecular Sieve Traps
Molecular Sieve Traps
Particulate Traps
Particulate Traps
 
LPCVD-TEOS Traps
LPCVD-TEOS Traps
 
Water-Cooled Traps
Water-Cooled Traps
Liquid Nitrogen Traps
Liquid Nitrogen Traps
 
Spares & Accessories
Spares & Accessories
 
Custom Foreline Traps
Custom Foreline Traps
 
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