Turbo Pump Dry Pump
 

Pump and Gas Line Heaters


Gas Line HeatersEBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems.

Pump lines and gas lines have unique thermal challenges due to many factors, including poor conductivity of stainless steel, differing thermal masses of plumbing components, and ambient temperature changes between the cleanroom and subfab.

Ebara heater products provide uniform heat flux to prevent condensation in gas delivery lines and clogging in pump lines.

EBARA provides “turn-key” service from system survey and measurement to heater and controller installation and test.


Straight Elbows T-Connector Flanges Reducers Gas Line Bellows

Pump & Gas Line Heater Products - Straights :

Part Number TUBE O.D (in.) LENGTH "L" (in.) WATTS 
W020050210 1.5 2 15
W020050217 1.5 2*  8
W030050197 1.5 3 22
W030050198 1.5 3* 15
W040050150 1.5 4 29
W040040151 1.5 4* 22
W050050167 1.5 5 36
W050050168 1.5 5* 29
W050060157 1.5 6 43
W050090504 1.5 9* 57
W050100518 1.5 10* 64
W050120108 1.5 12 85
W050120512 1.5 12* 77
W05018086 1.5 18 128
W050180503 1.5 18* 121
W05024093 1.5 24 170
W050240504 1.5 24* 163
W050300501 1.5 30 213
W05030099 1.5 30* 206
W050360504 1.5 36 255
W02006692 2 2 19
W02006696 2 2* 10
W03006692 2 3 29
W03006693 2 3* 19
W04006687 2 4 38
W04006688 2 4* 29
W05006683 2 5 48
W05006684 2 5* 38
W06006692 2 6 57
W06006691 2 6* 47
WL02080T 2 8* 67
WL02090T 2 9* 78
W066100501 2 10 95
WL02100T 2 10* 86
W06612087 2 12 114
W06612089 2 12* 104
WL020160T 2 16* 150
W06618081 2 18 170
W066180504 2 18* 160
W06624088 2 24 227
W06624089 2 24* 217
W06630081 2 30 283
W06630082 2 30* 273
W06636088 2 36 340
W02009687 3 2 24
W02009688 3 2* 12
W03009691 3 3 36
W03009692 3 3* 24
W04009682 3 4 48
W04009683 3 4* 36
W05009683 3 5 59
W05009684 3 5* 48
W06009689 3 6 71
W09612082 3 12 142
W09618099 3 18 213
W09624083 3 24 283
W09630099 3 30 354
W09636085 3 36 425
W02012888 4 2 32
W02012889 4 2* 16
W03012887 4 3 48
W03012888 4 3* 32
W04012882 4 4 63
W04012883 4 4* 48
W05012881 4 5 79
W05012882 4 5* 63
W06012886 4 6 95
W60128509 4 6* 79
WL04080T 4 8* 132
W090128508 4 9* 151
W100128508 4 10* 170
WL04110T 4 11* 195
W12012891 4 12 189
W12012896 4 12* 173
W128150502 4 15* 264
W12018081 4 18 283
W12824085 4 24 377
W128260503 4 26* 471
W12830082 4 30 472
W12830081 4 30* 456
W12836086 4 36 566


* Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note:
We offer heaters in both 120 and 208V

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