Turbo Pump Dry Pump
 

Pump and Gas Line Heaters


Gas Line HeatersEBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems.

Pump lines and gas lines have unique thermal challenges due to many factors, including poor conductivity of stainless steel, differing thermal masses of plumbing components, and ambient temperature changes between the cleanroom and subfab.

Ebara heater products provide uniform heat flux to prevent condensation in gas delivery lines and clogging in pump lines.

EBARA provides “turn-key” service from system survey and measurement to heater and controller installation and test.


Straight Elbows T-Connector Flanges Reducers Gas Line Bellows

Pump & Gas Line Heater Products - Elbows :

90º Elbow Heaters, without Tangent
PN Tube O.D. (in.) Length "L" (in.) Radius "R" (in.) OA (in.) IA (in.) Watts
W04205089 1.5 2.00 2.25 4.21 1.85 26
W05706692 2 2.75 3.00 5.78 2.64 45
W08909787 3 4.00 4.50 8.42 3.71 84
W12012894 4 5.50 6.00 11.56 5.28 149

45º Elbow Heaters, with Tangent
PN Tube O.D. (in.) Length "L" (in.) Radius "R" (in.) OA (in.) IA (in.) Watts
W03205088 1.5 1.38 2.25 3.23 2.04 23
W04706691 2 2.06 3.00 4.77 3.20 44
W07809782 3 3.18 4.50 7.33 4.97 85
W10412882 4 4.31 6.00 9.90 6.76 148

45º Elbow Heaters, without Tangent
PN Tube O.D. (in.) Length "L" (in.) Radius "R" (in.) OA (in.) IA (in.) Watts
W01805089 1.5 0.69 2.25 1.85 0.67 14
W02606687 2 1.00 3.00 2.64 1.07 23
W04209783 3 1.37 4.50 3.71 1.35 43
W05712885 4 2.00 6.00 5.28 2.14 75

* Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note:
We offer heaters in both 120 and 208V



Home | About  | Products  | Services  | Request for Quote  | Careers  | Quality  | Press |  Locations  |  Contact  |  Site Map  | Search

© 2006 - Ebara Technologies
Website Design by Smallbizwebsites.net