EBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems.
Pump lines and gas lines have unique thermal challenges due to many factors, including poor conductivity of stainless steel, differing thermal masses of plumbing components, and ambient temperature changes between the cleanroom and subfab.
Ebara heater products provide uniform heat flux to prevent condensation in gas delivery lines and clogging in pump lines.
EBARA provides “turn-key” service from system survey and measurement to heater and controller installation and test.
Pump & Gas Line Heater Products - Gas Line:
Description
PN without T/C
PN with T/C Type J
Watts
3/4 x 6"
W024060C1
W024060C1A
36
3/4 x 9"
W024090C1
W024090C1A
54
3/4 x 12"
W024120C1
W024120C1A
71
3/4 x 18"
W024180C1
W024180C1A
107
3/4 x 24"
W024240C1
W024240C1A
142
3/4 x 36"
W024360C1
W024360C1A
213
3/4" Insulator, 18" L
W024180C0
x
0
3/4" Insulator, 36" L
W02436084
x
0
3/4" ELBOW
W024020C0
x
0
3/4" "T"
W024030C0
x
0
0.25"
Description
PN without T/C
PN with T/C Type J
Watts
1/4 x 6"
W008060C1
W008060C1A
12
1/4 x 9"
W008090C1
W008090C1A
18
1/4 x 12"
W008120C1
W008120C1A
24
1/4 x 18"
W008180C1
W008180C1A
36
1/4 x 24"
W008240C1
W008240C1A
48
1/4 x 36"
W008360C1
W008360C1A
72
Male VCR Valve heater [3" L]
W03104786
-
18
Female VCR Valve heater [4.75" L]
W04704893
-
28
1/4" VCR Union heater [7/8" ID x 1 3/4" L]
W01702783
W01702783A
10
1/4" VCR Union insulator [3/4" ID x 1 1/2" L]
W02401580
-
0
1/4" Insulator, 18" L
008180C0
-
0
1/4" 90 DEG ELBOW
008020C0
-
0
1/4" "T"
008030C0
-
0
0.375"
Description
PN without T/C
PN with T/C Type J
Watts
3/8 x 6"
W012060C1
W012060C1A
18
3/8 x 9"
W012090C1
W012090C1A
27
3/8 x 12"
W012120C1
W012120C1A
36
3/8 x 18"
W012180C1
W012180C1A
54
3/8 x 24"
W012240C1
W012240C1A
72
3/8 x 36"
W012360C1
W012360C1A
108
3/8" Insulator, 18" L
W012180C0
x
0
3/8" 90 DEG ELBOW
W012020C0
x
0
3/8" "T"
W012030C0
x
0
0.5"
Description
PN without T/C
PN with T/C Type J
Watts
1/2 x 6"
W016060C1
W016060C1A
24
1/2 x 9"
W016090C1
W016090C1A
36
1/2 x 12"
W016120C1
W016120C1A
48
1/2 x 18"
W016180C1
W016180C1A
72
1/2 x 24"
W016240C1
W016240C1A
96
1/2 x 36"
W016360C1
W016360C1A
144
Male VCR Valve heater [3.75" L]
W03804782
x
27
Female VCR Valve heater [6.51" L]
W04706690
x
47
1/2" VCR Union heater [1 1/4" ID x 1 1/2" L]
W03901581
W04706690
12
1/2" VCR Union insulator [1 1/4" ID x 1 1/2" L]
W03901580
x
0
1/2" Insulator, 18" L
W016180C0
x
0
1/2" ELBOW
W016020C0
x
0
1/2" "T"
W016030C0
x
0
0.625"
Description
PN without T/C
PN with T/C Type J
Watts
5/8 x 6"
WL021060500U
x
36
5/8 x 9"
WL021090500U
x
54
5/8 x 12"
WL021120500U
x
71
5/8 x 18"
WL021180500U
x
107
5/8 x 24"
WL021240500U
x
142
5/8 x 36"
WL021360500U
x
213
5/8" Insulator, 18" L
WL021180501U
x
0
5/8" 45 DEG. ELBOW INSULATOR
WL021031500U
x
0
5/8" 90 DEG. ELBOW INSULATOR
WL021047500U
x
0
0.75"
Description
PN without T/C
PN with T/C Type J
Watts
3/4 x 6"
W024060C1
W024060C1A
36
3/4 x 9"
W024090C1
W024090C1A
54
3/4 x 12"
W024120C1
W024120C1A
71
3/4 x 18"
W024180C1
W024180C1A
107
3/4 x 24"
W024240C1
W024240C1A
142
3/4 x 36"
W024360C1
W024360C1A
213
3/4" Insulator, 18" L
W024180C0
x
0
3/4" Insulator, 36" L
W'02436084
x
0
3/4" ELBOW
W024020C0
x
0
3/4" "T"
W024030C0
x
0
* Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note: We offer heaters in both 120 and 208V