Turbo Pump Dry Pump
 

Pump and Gas Line Heaters


Gas Line HeatersEBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems.

Pump lines and gas lines have unique thermal challenges due to many factors, including poor conductivity of stainless steel, differing thermal masses of plumbing components, and ambient temperature changes between the cleanroom and subfab.

Ebara heater products provide uniform heat flux to prevent condensation in gas delivery lines and clogging in pump lines.

EBARA provides “turn-key” service from system survey and measurement to heater and controller installation and test.


Straight Elbows T-Connector Flanges Reducers Gas Line Bellows

Pump & Gas Line Heater Products - Gas Line:

Description PN without T/C PN with T/C Type J Watts
3/4 x 6" W024060C1 W024060C1A 36
3/4 x 9" W024090C1 W024090C1A 54
3/4 x 12" W024120C1 W024120C1A 71
3/4 x 18" W024180C1 W024180C1A 107
3/4 x 24" W024240C1 W024240C1A 142
3/4 x 36" W024360C1 W024360C1A 213
3/4"  Insulator, 18" L W024180C0  x  0
3/4"  Insulator, 36" L W02436084  x  0
3/4" ELBOW W024020C0  x  0
3/4" "T" W024030C0  x  0


0.25"
Description PN without T/C PN with T/C Type J
Watts
1/4 x 6" W008060C1 W008060C1A
12
1/4 x 9" W008090C1 W008090C1A
18
1/4 x 12" W008120C1 W008120C1A
24
1/4 x 18" W008180C1 W008180C1A
36
1/4 x 24" W008240C1 W008240C1A
48
1/4 x 36" W008360C1 W008360C1A
72
Male VCR Valve heater [3" L] W03104786 -
18
Female VCR Valve heater [4.75" L] W04704893 -
28
1/4" VCR Union heater [7/8" ID x 1 3/4" L] W01702783 W01702783A
10
1/4" VCR Union insulator [3/4" ID x 1 1/2" L] W02401580 -
0
1/4"  Insulator, 18" L 008180C0 -
0
1/4" 90 DEG ELBOW 008020C0 -
0
1/4" "T" 008030C0 -
0

0.375"
Description PN without T/C PN with T/C Type J
Watts
3/8 x 6" W012060C1 W012060C1A
18
3/8 x 9" W012090C1 W012090C1A
27
3/8 x 12" W012120C1 W012120C1A
36
3/8 x 18" W012180C1 W012180C1A
54
3/8 x 24" W012240C1 W012240C1A
72
3/8 x 36" W012360C1 W012360C1A
108
3/8"  Insulator, 18" L W012180C0 x
0
3/8" 90 DEG ELBOW W012020C0 x
0
3/8" "T" W012030C0 x
0

0.5"
Description PN without T/C PN with T/C Type J Watts
1/2 x 6" W016060C1 W016060C1A
24
1/2 x 9" W016090C1 W016090C1A
36
1/2 x 12" W016120C1 W016120C1A
48
1/2 x 18" W016180C1 W016180C1A
72
1/2 x 24" W016240C1 W016240C1A
96
1/2 x 36" W016360C1 W016360C1A
144
Male VCR Valve heater [3.75" L] W03804782 x
27
Female VCR Valve heater [6.51" L] W04706690 x
47
1/2" VCR Union heater [1 1/4" ID x 1 1/2" L] W03901581 W04706690
12
1/2" VCR Union insulator [1 1/4" ID x 1 1/2" L] W03901580 x
0
1/2"  Insulator, 18" L W016180C0 x
0
1/2" ELBOW W016020C0 x
0
1/2" "T" W016030C0 x
0

0.625"
Description PN without T/C PN with T/C Type J
Watts
5/8 x 6" WL021060500U  x 
36
5/8 x 9" WL021090500U  x 
54
5/8 x 12" WL021120500U  x 
71
5/8 x 18" WL021180500U  x 
107
5/8 x 24" WL021240500U  x 
142
5/8 x 36" WL021360500U  x 
213
5/8"  Insulator, 18" L WL021180501U  x 
0
5/8" 45 DEG. ELBOW INSULATOR WL021031500U  x 
0
5/8" 90 DEG. ELBOW INSULATOR WL021047500U  x 
0

0.75"
Description PN without T/C PN with T/C Type J
Watts
3/4 x 6" W024060C1 W024060C1A
36
3/4 x 9" W024090C1 W024090C1A
54
3/4 x 12" W024120C1 W024120C1A
71
3/4 x 18" W024180C1 W024180C1A
107
3/4 x 24" W024240C1 W024240C1A
142
3/4 x 36" W024360C1 W024360C1A
213
3/4"  Insulator, 18" L W024180C0  x 
0
3/4"  Insulator, 36" L W'02436084  x 
0
3/4" ELBOW W024020C0  x 
0
3/4" "T" W024030C0  x 
0

* Trim to Length Heaters
Note: Standard insulation thickness is 1/2 and 1/4, contact us for additional options
Note:
We offer heaters in both 120 and 208V



Home | About  | Products  | Services  | Request for Quote  | Careers  | Quality  | Press |  Locations  |  Contact  |  Site Map  | Search

© 2006 - Ebara Technologies
Website Design by Smallbizwebsites.net