The turbomolecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbomolecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.
EBARA's turbomolecular pumps offer full magnetic levitation rotor, which provides for a clean, reliable vacuum for today's semiconductor and solar industries. The ET and EMT Series turbomolecular pumps feature a five axis magnetic bearing and half rack controller requiring no tuning or battery backup.
The ET Series offers two major types of turbomolecular pumps - high compression, and corrosion resistant.
The EMT Series offers five major types of turbomolecular pumps - temperature controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.
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