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EMT Series Turbomolecular Pumps

Specifications Service & Repair Request Quote Related Products

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.

The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

The Ultra high vacuum model turbomolecular pumps efficiently evacuate the lightest gases from high vacuum down to the ultra high vacuum region by reducing the materials' out gassing and improving the efficiency of hydrogen compression. The Ultra high vacuum model turbomolecular pump can achieve 75 pTorr (10-8 Pa) with a short bake-out period.

The Ultra Low Vibration model turbomolecular pumps meets today's cutting edge challenges in EUV lithography, Micro-machining (MEMS), CD line width measurement, SEM/TEM Electron Microscopy, XPS and Nano-technology analytical tools. The Ultra low vibration model turbomolecular pumps produce less than 1nm vibration amplitude.

  • Full Magnetic Bearing
  • Installation in Any Orientation
  • High Throughput
  • Quick Starts and Stops
  • Compact Size
  • Serial Communication
  • Automatic Calibration
  • Rotational Speed Control
  • Energy Savings
  • Vibration Free
  • Air or Water Cooled
  • Safety Standards UL, CE, SEMI, NRTL
 EMT Turbomolecular Pump

EMT390 Series Specifications:

FlangeInletISO-B100 / CF100
OutletNW 25
Volume Flow RateN2 (L/s)340
H2 (L/s)320
Ar (L/s)290
Maximum Compression RatioN21x108
H24.5x103
Ultimate Pressure CF / ISO-BTorr< 7.5x10-9
Pa< 1x10-6
Allowable Outlet PressureTorr3
Pa400
Maximum ThroughputN2 (sccm)2000
N2 (Pa x L/s)3680
Ar (sccm)700
Ar (Pa x L/s)1290
Revolution SpeedRPM40,800
Startup TimeMinutes2 - 3
Shutdown TimeMinutes4 - 5
Installation Position Any
Vibration Level (0 - peak)7μm< 0.01
Pump Bake Out TemperatureDeg CMax 120
Bearing System5-axis magnetic bearing
Cooling SystemWater/Air
Cooling Water Flow RateL/min1.5
Recommended Backing pumpL/min≥ 160
N2 Gas Throughput for Purgingsscm10
Pa-L/sec18.4
Weight ISO-B/CFlb30/37
kg14/17

≥

EMT390 Pumping Speed


EMT390 Throughput


Air Cooling

Water Cooling


EMT420 Series Specifications:

FlangeInletISO-B160 / CF160
OutletNW 25
Volume Flow RateN2 (L/s)400
H2 (L/s)370
Ar (L/s)300
Maximum Compression RatioN21x108
H24.5x103
Ultimate Pressure CF / ISO-BTorr< 7.5x10-9
Pa< 1x10-6
Allowable Outlet PressureTorr3
Pa400
Maximum ThroughputN2 (sccm)2000
N2 (Pa x L/s)3680
Ar (sccm)700
Ar (Pa x L/s)1290
Revolution SpeedRPM40,800
Startup TimeMinutes2 - 3
Shutdown TimeMinutes4 - 5
Installation Position Any
Vibration Level (0 - peak)7μm< 0.01
Pump Bake Out TemperatureDeg CMax 120
Bearing System5-axis magnetic bearing
Cooling SystemWater/Air
Cooling Water Flow RateL/min1.5
Recommended Backing pumpL/min≥ 160
N2 Gas Throughput for Purgingsscm10
Pa-L/sec18.4
Weight ISO-B/CFlb30/37
kg14/17

EMT420 Pumping Speed


EMT420 Throughput


Air Cooling

Water Cooling


EMT900 Series Specifications:

FlangeInletISO-B160 / CF160
OutletNW 40
Volume Flow RateN2 (L/s)900
H2 (L/s)860
Ar (L/s)1050
Maximum Compression RatioN21x108
H21.5x104
Ultimate Pressure CF / ISO-BTorr< 7.5x10-9
Pa< 1x10-6
Allowable Outlet PressureTorr3.8
Pa500
Maximum ThroughputN2 (sccm)3000
N2 (Pa x L/s)5520
Ar (sccm)1500
Ar (Pa x L/s)2760
Revolution SpeedRPM33,600
Startup TimeMinutes4 - 5
Shutdown TimeMinutes4 - 5
Installation Position Any
Vibration Level (0 - peak)7μm< 0.005
Pump Bake Out TemperatureDeg CMax 120
Bearing System5-axis magnetic bearing
Cooling SystemWater/Air
Cooling Water Flow RateL/min1.5
Recommended Backing pumpL/min≥ 250
N2 Gas Throughput for Purgingsscm20
Pa-L/sec36.8
Weight ISO-B/CFlb34/42
kg75/92

EMT900 Pumping Speed


EMT900 Throughput


Air Cooling

Water Cooling


EMT1300 Series Specifications:

FlangeInletISO-B200 / CF200
OutletNW 40
Volume Flow RateN2 (L/s)1300
H2 (L/s)1230
Ar (L/s)1200
Maximum Compression RatioN21x108
H21.5x104
Ultimate Pressure CF / ISO-BTorr< 7.5x10-9
Pa< 1x10-6
Allowable Outlet PressureTorr3.8
Pa500
Maximum ThroughputN2 (sccm)3000
N2 (Pa x L/s)5520
Ar (sccm)1500
Ar (Pa x L/s)2760
Revolution SpeedRPM33,600
Startup TimeMinutes4 - 5
Shutdown TimeMinutes4 - 5
Installation Position Any
Vibration Level (0 - peak)7μm< 0.005
Pump Bake Out TemperatureDeg CMax 120
Bearing System5-axis magnetic bearing
Cooling SystemWater/Air
Cooling Water Flow RateL/min1.5
Recommended Backing pumpL/min≥ 250
N2 Gas Throughput for Purgingsscm20
Pa-L/sec36.8
Weight ISO-B/CFlb34/42
kg75/92

EMT1300 Pumping Speed


EMT1300 Throughput


Air Cooling

Water Cooling


EMT2400 Series Specifications:

FlangeInletISO-B250
OutletNW 40
Volume Flow RateN2 (L/s)2400
H2 (L/s)2300
Ar (L/s)1100
Maximum Compression RatioN21x108
H21.4x103
Ultimate Pressure CF / ISO-BTorr< 7.5x10-9
Pa< 1x10-6
Allowable Outlet PressureTorr1.5
Pa200
Maximum ThroughputN2 (sccm)3000
N2 (Pa x L/s)5520
Ar (sccm)2000
Ar (Pa x L/s)3680
Revolution SpeedRPM31,200
Startup TimeMinutes4 - 5
Shutdown TimeMinutes4 - 5
Installation Position Any
Vibration Level (0 - peak)7μm< 0.005
Pump Bake Out TemperatureDeg CMax 120
Bearing System5-axis magnetic bearing
Cooling SystemWater/Air
Cooling Water Flow RateL/min1.5
Recommended Backing pumpL/min≥ 500
N2 Gas Throughput for Purgingsscm20
Pa-L/sec36.8
Weight ISO-B/CFlb99/118
kg45/54

EMT2400 Pumping Speed


EMT2400 Throughput


Air Cooling

Water Cooling


EMT3260 Series Specifications:

FlangeInletISO-B320
OutletNW 40
Volume Flow RateN2 (L/s)3200
H2 (L/s)3000
Ar (L/s)2700
Maximum Compression RatioN21x108
H23x104
Ultimate Pressure CF / ISO-BTorr< 7.5x10-9
Pa< 1x10-6
Allowable Outlet PressureTorr3
Pa400
Maximum ThroughputN2 (sccm)2000
N2 (Pa x L/s)3680
Ar (sccm)-
Ar (Pa x L/s)-
Revolution SpeedRPM-
Startup TimeMinutes-
Shutdown TimeMinutes-
Installation Position Any
Vibration Level (0 - peak)7μm-
Pump Bake Out TemperatureDeg C-
Bearing System5-axis magnetic bearing
Cooling SystemWater/Air
Cooling Water Flow RateL/min-
Recommended Backing pumpL/min≥ 1500
N2 Gas Throughput for Purgingsscm-
Pa-L/sec-
Weight ISO-B/CFlb176/211
kg80/96

Water Cooling


EMT Controller Specifications:

  EMT010MEMT010MTEMT020
Input VoltageVAC200 - 240 (+/- 10%)
Input FrequencyHz50 - 60
Input PhasesSingle
Input PowerVA700 / 12001000 / 1600 / 17001200
Rated Output FrequencyHz680 / 560 / 520360
Weightlb242620
kg11129
Standard AccessoriesInput Cable (5 meter), Remote Connector
Pump ModelsEMT390, 420, 900, 1300, 2400EMT3260

EMT010M



EMT010MT



EMT020
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