| Flange |
Inlet |
VG 100 |
Outlet
|
NW 25 |
Pumping Speed
|
N2 (L/S) |
270 |
| Maximum Compression Ratio |
N2 |
> 10 E 9 |
| N2 |
7 x 10 E 3 |
| Ultimate Pressure |
Torr |
< 10 E-6 |
Allowable Outlet
Pressure
|
Pa (Torr) |
400 (3) |
| Revolution Speed |
RPM |
48,000 |
Run-Up Time |
Minutes |
6 |
| Installation Position |
|
Any |
| Vibration Level |
um 0-p |
< 0.01 |
| Pump Bake Out
Temperature |
Deg C |
max 100 |
| Bearing System |
|
5-axis magnetic bearing |
| Cooling System |
|
water |
| Cooling Water Flow
Rate |
L / min |
> 2 |
| N2 Gas Throughput
for Purging |
Pa-L/Sec
(sccm) |
85
(50) |
| Weight |
kg |
15 |
| Controller Model |
306W-TF |
| Input Voltage |
VAC |
100-240 |
| Frequency |
Hz |
50/60 |
| Phases |
|
1 |
Maximum Current
200 (100) VAC |
A |
4
(7) |
| Temperature |
Deg C |
0 - 45 |
| Approx. Weight |
Kg |
17 |
