Remanufacturing EBARA’s Re-manufacturing capabilities are centralized in Sacramento , CA where we have a state of the art 160,000 Ft. 2 ISO 9001 and ISO 14000 facilities with our Dry Pump manufacturing operations and vast Engineering resources readily available.
This state-of-the-art service center is “paperless” and supported by an enterprise system capable of issuing an RMA Number which will allows us to track the item in repair from receiving thorough disassembly, decontamination & cleaning, module assembly, system assembly, leak check & performance test and finally shipping.
This system will archive parts used, failure analysis reports, provide status at any given point in the re-manufacturing process & estimated completion time, performance test data, run time prior to disassembly, plus much more. Our service center employs more than 30 factory-trained technicians rebuilding over 300 pumps per month.
They utilize an automated clean-line where the detergents used to decontaminate the associated parts are environmentally friendly and EPA approved. EBARA also offers a new Copper segregation line. This line is used exclusively for customers using EBARA vacuum products when copper contamination is intolerable within their manufacturing practices.
EBARA’s remanufacturing process consists of:
A thorough decontamination & cleaning process enabling our technicians to inspect each individual part for wear or specification out of tolerance.
Replacement of new gears, bearings, and consumable parts to ensure quality and consistency in all remanufactured pumps.
Module & System assembly whereby EBARA propriety tooling is required to ensure successful integration of the entire vacuum pump.
A continuous improvement program where your pumps receive the latest engineering revisions whether it is a hardware or software improvement, or a procedural change ensuring success in the field.
Leak Check & Performance Test enabling the vacuum pump to be load tested under various vacuum pressure regimes.
Documented ISO 9001 monitored remanufacturing process building Quality safeguards in each step of the remanufacturing process.
Completed pump with EBARA warranty capable of meeting new unit performance and specifications.
Each pump that has cycled through EBARA’s remanufacturing process has a 12-month warranty from date of installation. Our commitment to engineering excellence is unparalleled, and we encourage you to visit our Sacramento, CA operations which include remanufacturing of vacuum pumps for Copper & non-Copper requirements, and our new unit manufacturing capabilities.
EBARA has established a 24/7 toll free number at 1-800-535-5376. This number is staffed to better assist you with acquiring an RMA Number, Contacting with an EBARA Service Coordinator, obtain Technical Support, or general information.
Field Service
Over the course of time, EBARA’s Components Field Service Team has become the benchmark for our competitors and has been widely recognized by major Semiconductor Manufacturers & Capital Equipment OEM’s. This awarding winning service group consists of over 35-factory trained Field Service Representatives at numerous strategic locations throughout the United States , and is the largest service network of its kind exceeding Semiconductor Industry requirements.
EBARA Technologies, Inc’s. Award-winning Field Service Team is capable of providing:
Site review (BKM & modeling for fore line & exhaust line design)
Installation (cabling, placing the rack and pumps)
Commissioning (start-up, ensure the main body tool interfaces correctly with pump)
Audits (daily, weekly monitoring, data collection, or asset control)
Preventive Maintenance (calendar based, wafers process, gas-on or RF hours, or proactive exchange schedule)
Pump exchange / replacement (proactive or run to fail)
Packing & shipping (following DOT guidelines)
Escalating problematic processes to Ebara’s proven Technical Support Engineers
Extensive on-site inventory (periodic replacement parts, consumables, and pumps in support preventive maintenance programs)
Service vehicles capable of transporting contaminated equipment according to DOT regulations.
Guaranteed uptime utilizing Semi standards
Logistics monitoring (data collection, install records, start-date, pull dates, warranty tracking, turn around time monitoring).
Safety program ensuring our Service personnel are working safely.
Not only do we service EBARA vacuum products, this Service Group also successfully supports service agreements where we are responsible for servicing non-EBARA sub-fab equipment (abatement cabinets, chillers, vacuum pumps) with well over 10 years of experience supporting our competitors’ sub-fab equipment efficiently.
Given EBARA’s vast industry experience while considering both EBARA vacuum products and servicing competitors’ products enables EBARA to be a leader in ensuring your success and maximizing your manufacturing capabilities.
EBARA Technologies, Inc. is committed to providing a total sub-fab solution based on servicing your products, enabling the end-user to focus on what you do best – manufacturing!
Third Party Services
Our award-winning Field Service team, by servicing your sub-fab equipment and utilizing our extensive knowledge base, accomplishes this in the following technology segments:
Vacuum Pumps
Point of Use Abatement Cabinets
Chillers
RF Power Supplies
Mass Flow Controllers
Specialty process kit parts cleaning
EBARA’s Field Service Team provides the same level of service that you have grown to expect. We will develop and perform the required Preventive Maintenance for non-EBARA products, becoming the first level of support for unplanned maintenance. In the event the solution for unplanned maintenance event appears problematic, EBARA has effectively escalated these events with the corresponding OEM to ensure your downtime is kept to a minimum.
EBARA also provides rebuild, repair and return services for competitors’ Dry, Wet, Turbo and Cryo pumps. EBARA Technologies, Inc. is also capable of providing re-manufacturing services for the products listed above. EBARA’s Field Service Team will perform the exchange, pack & ship, and manage the logistics associated with ensuring your success.
ASC2T Components Parts Cleaning and Services via Thermagas Processing
Ebara Technologies Inc, Components Division, is now the Semiconductor Applications representative for ASC2T, Advanced Semiconductor Cleaning / Coating Technology.
ASC2T provides a technologically advanced cleaning service for ceramic and carbon based components commonly used in Ion Implant, MOCVD and MBE applications. Utilizing a proprietary dry thermal cleaning and reconditioning technology ASC2T can process and return parts that comply with “as new” specifications with no additional preparation required by the end user. ASC2T’s cost effective part cleaning system greatly reduces pump-down time, preparation time and eliminates outgassing procedures. The result is an improvement in operation efficiency and yield, a lower cost of ownership, increased component longevity and a reduction of hazardous waste handling.
