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Third Party Services
Our award-winning Field Service team, by servicing your sub-fab equipment and utilizing our extensive knowledge base, accomplishes this in the following technology segments:
- Vacuum Pumps
- Point of Use Abatement Cabinets
- Chillers
- RF Power Supplies
- Mass Flow Controllers
- Specialty process kit parts cleaning
EBARA’s Field Service Team provides the same level of service that you have grown to expect. We will develop and perform the required Preventive Maintenance for non-EBARA products, becoming the first level of support for unplanned maintenance. In the event the solution for unplanned maintenance event appears problematic, EBARA has effectively escalated these events with the corresponding OEM to ensure your downtime is kept to a minimum.
EBARA also provides rebuild, repair and return services for competitors’ Dry, Wet, Turbo and Cryo pumps. EBARA Technologies, Inc. is also capable of providing re-manufacturing services for the products listed above. EBARA’s Field Service Team will perform the exchange, pack & ship, and manage the logistics associated with ensuring your success. |
