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Field Service
Over the course of time, EBARA’s Components Field Service Team has become the benchmark for our competitors and has been widely recognized by major Semiconductor Manufacturers & Capital Equipment OEM’s. This awarding winning service group consists of over 35-factory trained Field Service Representatives at numerous strategic locations throughout the United States , and is the largest service network of its kind exceeding Semiconductor Industry requirements.
EBARA Technologies, Inc’s. Award-winning Field Service Team is capable of providing:
- Site review (BKM & modeling for fore line & exhaust line design)
- Installation (cabling, placing the rack and pumps)
- Commissioning (start-up, ensure the main body tool interfaces correctly with pump)
- Audits (daily, weekly monitoring, data collection, or asset control)
- Preventive Maintenance (calendar based, wafers process, gas-on or RF hours, or proactive exchange schedule)
- Pump exchange / replacement (proactive or run to fail)
- Packing & shipping (following DOT guidelines)
- Escalating problematic processes to Ebara’s proven Technical Support Engineers
- Extensive on-site inventory (periodic replacement parts, consumables, and pumps in support preventive maintenance programs)
- Service vehicles capable of transporting contaminated equipment according to DOT regulations.
- Guaranteed uptime utilizing Semi standards
- Logistics monitoring (data collection, install records, start-date, pull dates, warranty tracking, turn around time monitoring).
- Safety program ensuring our Service personnel are working safely.
Not only do we service EBARA vacuum products, this Service Group also successfully supports service agreements where we are responsible for servicing non-EBARA sub-fab equipment (abatement cabinets, chillers, vacuum pumps) with well over 10 years of experience supporting our competitors’ sub-fab equipment efficiently.
Given EBARA’s vast industry experience while considering both EBARA vacuum products and servicing competitors’ products enables EBARA to be a leader in ensuring your success and maximizing your manufacturing capabilities.
EBARA Technologies, Inc. is committed to providing a total sub-fab solution based on servicing your products, enabling the end-user to focus on what you do best – manufacturing!
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