Exhaust Management Solutions for the Compound Semiconductor Industry
EBARA is a leading supplier of specialty vacuum products for the Compound Semiconductor Industry. Compound semiconductor is based on metalorganic compounds with elements from different groups of the periodic table, e.g. GaN, GaAs, InP, SiC. These play a key role in many of today's fastest growing market segments, such as:
- LEDs for FPD backlighting
- Solid state lighting
- Traffic lighting
- High performance lasers for blue ray discs or industrial applications.
Future markets are in the area of General Lighting, Photovoltaic and OLED.
Most of the above applications employ sophisticated processes, such as Metal Organic Chemical Vapor Deposition (MOCVD), Molecular Beam Epitaxy (MBE) and Hydride Vapour Phase Epitaxy (HVPE).
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